2D photonic crystal TM polarizer fabricated by one-step combined nanoimprint and photolithography

K. H. Choi, J. Huh, Y. Cui, Byeong Kwon Ju, W. Hu, J. B. Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Photonic crystal has been widely investigated since it has a great potential to manipulate the flow of light in ultra compact scale. 2D slab photonic crystals for telecommunication wavelengths (e.g., 1550 nm) have multi-scale structures which are typically micron scale waveguides and deep sub-micron scale air-hole array. Several steps of nanolithography and photolithography are usually used for the fabrication of multi-scale photonic crystals. Such a multi-step lithography process increases fabrication complexity. In this work, we report one-step lithography process to pattern both micron and deep sub-micron features simultaneously using combined-nanoimprint- and-photolithography. As a demonstrator, a 2D silicon photonic crystal transverse magnetic (TM) polarizer was fabricated and characterized.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1638-1641
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • hybrid mask mold
  • nanoimprint lithography
  • photolithography
  • Photonic crystals

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Choi, K. H., Huh, J., Cui, Y., Ju, B. K., Hu, W., & Lee, J. B. (2011). 2D photonic crystal TM polarizer fabricated by one-step combined nanoimprint and photolithography. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1638-1641). [5969813] https://doi.org/10.1109/TRANSDUCERS.2011.5969813