3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer

Jong Yeon Park, Kun Tae Kim, Hyun Joon Shin, Sung Moon, James Jungho Pak

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This paper describes polidimethylsiloxane(PDMS) based bonding for assembly of microstructure device, an UV lithography applications for fabricating a 3-dimensional (3D) feed-horn-shaped structure mold array, and obtaining parallel light by using a mirror-reflected parallel-beam illuminator (MRPBI) system. A 3D feed-horn-shaped micro-electro-mechanical systems (MEMS) antenna has some attractive features for array applications, which can be used to improve microbolometer performance and to enhance the optical efficiency for thin film transistor-liquid crystal display (TFT-LCD) and other display devices but currently, MEMS technology has faced many difficulties in the fabrication of a 3D feed-horn-shaped MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed-horn-shaped MEMS antenna array by using a mirror-reflected parallel-beam illuminator (MRPBI) System with a very slowly rotated, inclined x-y-z stage. With a conventional UV lithography apparatus, it is very difficult to fabricate high-aspect-ratio structures (HARS) because a typical UV lithography apparatus cannot produce perfectly parallel light. From a theoretical analysis, a columnar illuminator over 6 m in height is required to achieve parallel light, but generally a laboratory height is not 6 m. Also, a novel method of lithography was tried to make a 3D structure array by exposing a planar wafer to the generated parallel light and rotating an inclined x-y-z stage at an ultra-slow rate. An optimization of the 3D structure array can be achieved by simulating a 3D feed-horn MEMS antenna. The feasibility of fabricating both a 3D feed horn MEMS antenna and assembly of detector with 3D feed-horn MEMS antenna was demonstrated. As a result, it seems possible to use a 3D feed-horn-shaped MEMS antenna to improve microbolometer performance and to fabricate several optical microstructure applications.

Original languageEnglish
Pages (from-to)168-178
Number of pages11
JournalMicrosystem Technologies
Volume11
Issue number2-3
DOIs
Publication statusPublished - 2005 Sep 6

Fingerprint

Infrared detectors
Antenna feeders
Polymers
Fabrication
Lithography
microstructure
Microstructure
fabrication
Antennas
detectors
polymers
antennas
illuminators
lithography
Antenna arrays
Ultraviolet devices
antenna arrays
Mirrors
assembly
Thin film transistors

Keywords

  • Infrared Detector
  • Mesh Structure Bonding
  • Microstructure
  • PDMS
  • UV-Lithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer. / Park, Jong Yeon; Kim, Kun Tae; Shin, Hyun Joon; Moon, Sung; Pak, James Jungho.

In: Microsystem Technologies, Vol. 11, No. 2-3, 06.09.2005, p. 168-178.

Research output: Contribution to journalArticle

Park, Jong Yeon ; Kim, Kun Tae ; Shin, Hyun Joon ; Moon, Sung ; Pak, James Jungho. / 3D Optical microstructure fabrication and its bonding to micro IR detector using elastomeric polymer. In: Microsystem Technologies. 2005 ; Vol. 11, No. 2-3. pp. 168-178.
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