5 nm thick lanthanum oxide thin films grown on Si(100) by atomic layer deposition: The effect of post-annealing on the electrical properties

Sang Jin Jo, Jeong Sook Ha, Nam Kyun Park, Dong Kyun Kang, Byong Ho Kim

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

Amorphous stoichiometric lanthanum oxide (La 2O 3) thin films were grown on Si(100) by atomic layer deposition technique using lanthanum 2,2,6,6-tetramethyl-3,5-heptanedione and water (H 2O) as precursors. The structural and electrical properties were investigated by transmission electron microscope, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), current-voltage (I-V) and capacitance-voltage (C-V) measurements. In particular, the effects of thermal annealing on the La 2O 3 film properties such as crystallinity, I-V, and C-V characteristics were measured. Post-annealing at 700 °C improved the electrical properties to reduce the leakage current density up to 2 × 10 - 7 A/cm 2 at the bias voltage of + 1 V. It was also observed that the capacitance increased and the shift of the flat band voltage, V FB, disappeared with the post-annealing.

Original languageEnglish
Pages (from-to)253-257
Number of pages5
JournalThin Solid Films
Volume513
Issue number1-2
DOIs
Publication statusPublished - 2006 Aug 14

Fingerprint

Lanthanum oxides
lanthanum oxides
Atomic layer deposition
atomic layer epitaxy
Oxide films
Electric properties
electrical properties
Annealing
Thin films
annealing
Electric potential
electric potential
Capacitance
thin films
capacitance
Lanthanum
Capacitance measurement
capacitance-voltage characteristics
Voltage measurement
Bias voltage

Keywords

  • Atomic layer deposition
  • High-k dielectrics
  • La O
  • Post-annealing effect

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

5 nm thick lanthanum oxide thin films grown on Si(100) by atomic layer deposition : The effect of post-annealing on the electrical properties. / Jo, Sang Jin; Ha, Jeong Sook; Park, Nam Kyun; Kang, Dong Kyun; Kim, Byong Ho.

In: Thin Solid Films, Vol. 513, No. 1-2, 14.08.2006, p. 253-257.

Research output: Contribution to journalArticle

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