A 300-GHz CMOS 7-by-7 Detector Array for Optics-less THz Imaging with Scan-less Target Object

Kiryong Song, Jungsoo Kim, Doyoon Kim, Junghwan Yoo, Jae Sung Rieh

Research output: Contribution to journalArticle

Abstract

In this work, a 300-GHz 7 × 7 detector array based on a 65-nm Si CMOS technology has been developed and transmission imaging was performed using the detector array without any optical elements. The detector array consists of a 7-by-7 arrangement of 49 pixels in a full-chip size of 4 mm × 4 mm. The unit pixel is composed of a single direct detector with a differential common-gate configuration and a differential patch antenna. The fabricated CMOS detector array chip was mounted on a planar package for electrical characterization and imaging. The measured responsivity and the noise equivalent power (NEP) showed best values of 3599 V/W and 12.46 pW/Hz1/2, respectively, at 303 GHz. Various THz imaging experiments were carried out based on the packaged CMOS detector array with a setup that does not require optical elements or the raster scan of the target object.

Original languageEnglish
Pages (from-to)202-214
Number of pages13
JournalJournal of Infrared, Millimeter, and Terahertz Waves
Volume41
Issue number2
DOIs
Publication statusPublished - 2020 Feb 1

Keywords

  • CMOS
  • Detector array
  • Terahertz
  • Transmission imaging

ASJC Scopus subject areas

  • Radiation
  • Instrumentation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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