A bridge-type piezoresistive accelerometer using merged epitaxial lateral overgrowth for thin silicon beam formation

James J. Pak, Abul E. Kabir, Gerold W. Neudeck, James H. Logsdon

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A bridge-type piezoresistive accelerometer using merged epitaxial lateral overgrowth for thin silicon beam formation'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds