A classification and verification of real pattern defects with dust filtering in tape substrate inspection

Young Jun Roh, Cheol Woo Kim, Jung Yeol Yeom, Chang Ook Jung, Dae Hwa Jeong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'A classification and verification of real pattern defects with dust filtering in tape substrate inspection'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds