@article{00b1596c4cb24672a9a635d76d0923c4,
title = "A comprehensive study on the effect of tin top and bottom electrodes on atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films",
abstract = "The discovery of ferroelectricity in HfO2-based materials in 2011 provided new research directions and opportunities. In particular, for atomic layer deposited Hf0.5Zr0.5O2 (HZO) films, it is possible to obtain homogenous thin films with satisfactory ferroelectric properties at a low thermal budget process. Based on experiment demonstrations over the past 10 years, it is well known that HZO films show excellent ferroelectricity when sandwiched between TiN top and bottom electrodes. This work reports a comprehensive study on the effect of TiN top and bottom electrodes on the ferroelectric properties of HZO thin films (10 nm). Investigations showed that during HZO crystallization, the TiN bottom electrode promoted ferroelectric phase formation (by oxygen scavenging) and the TiN top electrode inhibited non-ferroelectric phase formation (by stress-induced crystallization). In addition, it was confirmed that the TiN top and bottom electrodes acted as a barrier layer to hydrogen diffusion into the HZO thin film during annealing in a hydrogen-containing atmosphere. These features make the TiN electrodes a useful strategy for improving and preserving the ferroelectric properties of HZO thin films for next-generation memory applications.",
keywords = "Atomic layer deposition, Ferroelectric film, HfZrO, Low thermal budget process, TiN electrode",
author = "Kim, {Si Joon} and Jaidah Mohan and Kim, {Harrison Sejoon} and Hwang, {Su Min} and Namhun Kim and Jung, {Yong Chan} and Akshay Sahota and Kihyun Kim and Yu, {Hyun Yong} and Cha, {Pil Ryung} and Young, {Chadwin D.} and Rino Choi and Jinho Ahn and Jiyoung Kim",
note = "Funding Information: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIT) (No. NRF-2019R1F1A1059972) and 2019 Research Grant from Kangwon National University. This work was also partially supported by Brain Pool Program through NRF by the Ministry of Science and ICT in Korea (No. 2019H1D3A2A01101691), NRF grant (No. NRF-2019M3F3A1A02071969 and NRF-2019M3F3A1A02071966), and the MOTIE (Ministry of Trade, Industry, and Energy) in Korea under the Fostering Global Talents for Innovative Growth Program (P0008750) supervised by the Korea Institute for Advancement of Technology (KIAT). The authors wish to thank S.R. Summerfelt from Texas Instruments for his scientific insights and technical advice. The authors would like to acknowledge Toshiba-Mitsubishi-Electric Industrial Systems Corporation (TMEIC) for providing the ozone generator. Funding Information: Funding: This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIT) (No. NRF-2019R1F1A1059972) and 2019 Research Grant from Kangwon National University. This work was also partially supported by Brain Pool Program through NRF by the Ministry of Science and ICT in Korea (No. 2019H1D3A2A01101691), NRF grant (No. NRF-2019M3F3A1A02071969 and NRF-2019M3F3A1A02071966), and the MOTIE (Ministry of Trade, Industry, and Energy) in Korea under the Fostering Global Talents for Innovative Growth Program (P0008750) supervised by the Korea Institute for Advancement of Technology (KIAT).",
year = "2020",
month = jul,
day = "1",
doi = "10.3390/ma13132968",
language = "English",
volume = "13",
pages = "1--8",
journal = "Materials",
issn = "1996-1944",
publisher = "MDPI AG",
number = "13",
}