A comprehensive study on the effect of tin top and bottom electrodes on atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films

Si Joon Kim, Jaidah Mohan, Harrison Sejoon Kim, Su Min Hwang, Namhun Kim, Yong Chan Jung, Akshay Sahota, Kihyun Kim, Hyun Yong Yu, Pil Ryung Cha, Chadwin D. Young, Rino Choi, Jinho Ahn, Jiyoung Kim

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Engineering & Materials Science

Chemical Compounds