Abstract
This paper presents a concurrent approach to solve the design problem of facility layout and automated material handling system (AMHS) for semiconductor fabs. The layout is composed of bays which are unequal-area blocks with equal height but flexible width. In particular, the bay width and locations of a shortcut, bays, and their stockers, which are major fab design considerations, are concurrently determined in this problem. We developed a mixed integer programming (MIP) model for this problem to minimize the total travel distance (TTD) based on unidirectional interbay flow and a bidirectional shortcut. To solve large-sized problems, we developed a five-step heuristic algorithm to exploit and explore the solution space based on the MIP model. The computational results show that the proposed algorithm is able to find optimal solutions of small-sized problems and to solve large-sized problems within acceptable time.
| Original language | English |
|---|---|
| Pages (from-to) | 231-242 |
| Number of pages | 12 |
| Journal | International Journal of Industrial Engineering : Theory Applications and Practice |
| Volume | 21 |
| Issue number | 4 |
| Publication status | Published - 2014 |
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Keywords
- AMHS design
- Bay layout
- Concurrent approach
- Facility layout
- Semiconductor manufacturing
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
Cite this
A concurrent approach for facility layout and AMHS design in semiconductor manufacturing. / Hong, Dongphyo; Seo, Yoon Ho; Xiao, Yujie.
In: International Journal of Industrial Engineering : Theory Applications and Practice, Vol. 21, No. 4, 2014, p. 231-242.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A concurrent approach for facility layout and AMHS design in semiconductor manufacturing
AU - Hong, Dongphyo
AU - Seo, Yoon Ho
AU - Xiao, Yujie
PY - 2014
Y1 - 2014
N2 - This paper presents a concurrent approach to solve the design problem of facility layout and automated material handling system (AMHS) for semiconductor fabs. The layout is composed of bays which are unequal-area blocks with equal height but flexible width. In particular, the bay width and locations of a shortcut, bays, and their stockers, which are major fab design considerations, are concurrently determined in this problem. We developed a mixed integer programming (MIP) model for this problem to minimize the total travel distance (TTD) based on unidirectional interbay flow and a bidirectional shortcut. To solve large-sized problems, we developed a five-step heuristic algorithm to exploit and explore the solution space based on the MIP model. The computational results show that the proposed algorithm is able to find optimal solutions of small-sized problems and to solve large-sized problems within acceptable time.
AB - This paper presents a concurrent approach to solve the design problem of facility layout and automated material handling system (AMHS) for semiconductor fabs. The layout is composed of bays which are unequal-area blocks with equal height but flexible width. In particular, the bay width and locations of a shortcut, bays, and their stockers, which are major fab design considerations, are concurrently determined in this problem. We developed a mixed integer programming (MIP) model for this problem to minimize the total travel distance (TTD) based on unidirectional interbay flow and a bidirectional shortcut. To solve large-sized problems, we developed a five-step heuristic algorithm to exploit and explore the solution space based on the MIP model. The computational results show that the proposed algorithm is able to find optimal solutions of small-sized problems and to solve large-sized problems within acceptable time.
KW - AMHS design
KW - Bay layout
KW - Concurrent approach
KW - Facility layout
KW - Semiconductor manufacturing
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UR - http://www.scopus.com/inward/citedby.url?scp=84957002151&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:84957002151
VL - 21
SP - 231
EP - 242
JO - International Journal of Industrial Engineering : Theory Applications and Practice
JF - International Journal of Industrial Engineering : Theory Applications and Practice
SN - 1072-4761
IS - 4
ER -