Abstract
To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 718-721 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2005 Oct 25 |
| Externally published | Yes |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3 |
Other
| Other | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami |
|---|---|
| Country | United States |
| City | Miami Beach, FL |
| Period | 05/1/30 → 05/2/3 |
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ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Control and Systems Engineering
Cite this
A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. / Chua, Beelee; Zhang, M.; Huber, J. M.; Broeke, R. G.; Wexler, A. S.; Tien, N. C.; Niemeier, D. A.; Holmen, B. A.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 718-721 WP15.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal
AU - Chua, Beelee
AU - Zhang, M.
AU - Huber, J. M.
AU - Broeke, R. G.
AU - Wexler, A. S.
AU - Tien, N. C.
AU - Niemeier, D. A.
AU - Holmen, B. A.
PY - 2005/10/25
Y1 - 2005/10/25
N2 - To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.
AB - To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.
UR - http://www.scopus.com/inward/record.url?scp=26844559787&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=26844559787&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2005.1454030
DO - 10.1109/MEMSYS.2005.1454030
M3 - Conference contribution
AN - SCOPUS:26844559787
SN - 0780387325
SP - 718
EP - 721
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -