A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal

Beelee Chua; M. Zhang; J. M. Huber; R. G. Broeke; A. S. Wexler; N. C. Tien; D. A. Niemeier; B. A. Holmen

doi:10.1109/MEMSYS.2005.1454030

A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal

Beelee Chua, M. Zhang, J. M. Huber, R. G. Broeke, A. S. Wexler, N. C. Tien, D. A. Niemeier, B. A. Holmen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	718-721
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2005.1454030
Publication status	Published - 2005 Oct 25
Externally published	Yes
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3

Other

Other	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Country	United States
City	Miami Beach, FL
Period	05/1/30 → 05/2/3

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

Access to Document

10.1109/MEMSYS.2005.1454030

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Chua, B., Zhang, M., Huber, J. M., Broeke, R. G., Wexler, A. S., Tien, N. C., Niemeier, D. A., & Holmen, B. A. (2005). A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 718-721). [WP15] https://doi.org/10.1109/MEMSYS.2005.1454030

A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. / Chua, Beelee; Zhang, M.; Huber, J. M.; Broeke, R. G.; Wexler, A. S.; Tien, N. C.; Niemeier, D. A.; Holmen, B. A.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 718-721 WP15.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chua, B, Zhang, M, Huber, JM, Broeke, RG, Wexler, AS, Tien, NC, Niemeier, DA & Holmen, BA 2005, A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., WP15, pp. 718-721, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 05/1/30. https://doi.org/10.1109/MEMSYS.2005.1454030

Chua B, Zhang M, Huber JM, Broeke RG, Wexler AS, Tien NC et al. A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. p. 718-721. WP15 https://doi.org/10.1109/MEMSYS.2005.1454030

Chua, Beelee ; Zhang, M. ; Huber, J. M. ; Broeke, R. G. ; Wexler, A. S. ; Tien, N. C. ; Niemeier, D. A. ; Holmen, B. A. / A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2005. pp. 718-721

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abstract = "To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.",

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