A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal

B. L. Chua, M. Zhang, J. M. Huber, R. G. Broeke, A. S. Wexler, N. C. Tien, D. A. Niemeier, B. A. Holmen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

To address the demand for high performance localized air filtration systems, we developed a configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. It consumes low power of less than 4mW and is able to operate at a flowrate of 1.6L/min per device. The unipolar charger and separator electrodes are fabricated on the same substrate for close proximity to minimize charge loss due to particle diffusion. A straight air channel with uniform cross-section between the inlet and outlet minimizes pressure loss, maximizes operational flow rate, and ensures laminar flow for effective particle separation and removal. A flow divider before the outlet physically separates the particle-laden and cleaned air before they exit the separator electrodes' electric field.

Original languageEnglish
Title of host publicationProceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest
Pages718-721
Number of pages4
DOIs
Publication statusPublished - 2005
Externally publishedYes
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: 2005 Jan 302005 Feb 3

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
CountryUnited States
CityMiami Beach, FL
Period05/1/3005/2/3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Chua, B. L., Zhang, M., Huber, J. M., Broeke, R. G., Wexler, A. S., Tien, N. C., Niemeier, D. A., & Holmen, B. A. (2005). A configuration for high flow rate, high efficiency and low pressure loss micromachined active air filtration element for airborne micro-nanoscale particles separation and removal. In Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Technical Digest (pp. 718-721). [WP15] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2005.1454030