A constant delivery micropump using surface tension and thermopneumatic pressure

Do Han Jun; Sang Sik Yang; Woo Young Sim; James Jungho Pak

doi:10.1115/IMECE2006-14390

A constant delivery micropump using surface tension and thermopneumatic pressure

Do Han Jun, Sang Sik Yang, Woo Young Sim, James Jungho Pak

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the fabrication and test of a constant delivery thermopneumatic micropump made of PDMS without any moving part. The driving force of the liquid discharge is the pneumatic pressure of heated air and the suction of liquid is accomplished by the surface tension. The proposed micropump consists of an inlet, an outlet, a pump chamber, two air chambers, two air discharge channels and two air suction channels. The air chambers have electric heaters on the Pyrex glass substrate. Each air chamber is connected the pump chamber through two different air channels which behaves like check valves. The micropump is fabricated through the spincoating process, the lithograph process, the PDMS molding process and etc. The total dimension of the micropump is 11.7 × 8.8 × 0.7 mm³. The discharge volume of the fabricated micropump was measured for various backward pressures ranging from 0 to 20 cmH₂O. The micropump discharges 116 nanoliters in 4 seconds for zero discharge pressure when the input voltage is 3.5 V. As the discharge pressure increases, the discharge volume decreases gradually. The discharge volume deviation is less than 15 percent for the discharge pressure range between 5 and 15 cmH₂O. This proposed micropump is feasible for disposable transdermal drug delivery systems.

Original language	English
Title of host publication	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Print)	0791837904, 9780791837900
DOIs	https://doi.org/10.1115/IMECE2006-14390
Publication status	Published - 2006 Jan 1
Event	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL, United States Duration: 2006 Nov 5 → 2006 Nov 10

Other

Other	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
Country	United States
City	Chicago, IL
Period	06/11/5 → 06/11/10

ASJC Scopus subject areas

Engineering(all)

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10.1115/IMECE2006-14390

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A constant delivery micropump using surface tension and thermopneumatic pressure. / Jun, Do Han; Yang, Sang Sik; Sim, Woo Young; Pak, James Jungho.

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. American Society of Mechanical Engineers (ASME), 2006.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jun, DH, Yang, SS, Sim, WY & Pak, JJ 2006, A constant delivery micropump using surface tension and thermopneumatic pressure. in American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS. American Society of Mechanical Engineers (ASME), 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006, Chicago, IL, United States, 06/11/5. https://doi.org/10.1115/IMECE2006-14390

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abstract = "This paper presents the fabrication and test of a constant delivery thermopneumatic micropump made of PDMS without any moving part. The driving force of the liquid discharge is the pneumatic pressure of heated air and the suction of liquid is accomplished by the surface tension. The proposed micropump consists of an inlet, an outlet, a pump chamber, two air chambers, two air discharge channels and two air suction channels. The air chambers have electric heaters on the Pyrex glass substrate. Each air chamber is connected the pump chamber through two different air channels which behaves like check valves. The micropump is fabricated through the spincoating process, the lithograph process, the PDMS molding process and etc. The total dimension of the micropump is 11.7 × 8.8 × 0.7 mm3. The discharge volume of the fabricated micropump was measured for various backward pressures ranging from 0 to 20 cmH2O. The micropump discharges 116 nanoliters in 4 seconds for zero discharge pressure when the input voltage is 3.5 V. As the discharge pressure increases, the discharge volume decreases gradually. The discharge volume deviation is less than 15 percent for the discharge pressure range between 5 and 15 cmH2O. This proposed micropump is feasible for disposable transdermal drug delivery systems.",

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AB - This paper presents the fabrication and test of a constant delivery thermopneumatic micropump made of PDMS without any moving part. The driving force of the liquid discharge is the pneumatic pressure of heated air and the suction of liquid is accomplished by the surface tension. The proposed micropump consists of an inlet, an outlet, a pump chamber, two air chambers, two air discharge channels and two air suction channels. The air chambers have electric heaters on the Pyrex glass substrate. Each air chamber is connected the pump chamber through two different air channels which behaves like check valves. The micropump is fabricated through the spincoating process, the lithograph process, the PDMS molding process and etc. The total dimension of the micropump is 11.7 × 8.8 × 0.7 mm3. The discharge volume of the fabricated micropump was measured for various backward pressures ranging from 0 to 20 cmH2O. The micropump discharges 116 nanoliters in 4 seconds for zero discharge pressure when the input voltage is 3.5 V. As the discharge pressure increases, the discharge volume decreases gradually. The discharge volume deviation is less than 15 percent for the discharge pressure range between 5 and 15 cmH2O. This proposed micropump is feasible for disposable transdermal drug delivery systems.

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