Abstract
We describe here a simple and novel method to fabricate polyimide (PI) electrodes without a complex process to release completed PI electrodes from the substrates after full-curing process. We separated the PI electrodes from the Si-wafer prior to full-curing process, and these non full-cured electrodes were placed between the Kapton films, and we performed full-curing process with these sandwiched electrodes. Then, PI electrodes were easily and clearly released from the substrate without the sacrificial layers. We assessed the mechanical properties of fabricated electrodes comparing with non full-cured PI electrodes to investigate the full-curing effect between Kapton films. The electrical property was evaluated by measuring the impedance. Testing of the cyto-toxicity of full-cured electrodes using human mesenchymal stem cells (hMSCs) and mouse fibroblasts (L929) was carried out and the electrodes fabricated by proposed method were nontoxic and could be used as implantable electrodes. We also found that the electrodes, uniformly spread on the surface of mouse skulls while maintaining close contact, could successfully measure multichannel EEG signals.
| Original language | English |
|---|---|
| Pages (from-to) | 7-14 |
| Number of pages | 8 |
| Journal | Microsystem Technologies |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2011 Jan 1 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Hardware and Architecture
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
Cite this
A dry release of polyimide electrodes using Kapton film and application to EEG signal measurements. / Baek, Dong Hyun; Moon, Jin Hee; Choi, Yoon Young; Lee, Mina; Choi, Jee Hyun; Pak, James Jungho; Lee, Sang Hoon.
In: Microsystem Technologies, Vol. 17, No. 1, 01.01.2011, p. 7-14.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A dry release of polyimide electrodes using Kapton film and application to EEG signal measurements
AU - Baek, Dong Hyun
AU - Moon, Jin Hee
AU - Choi, Yoon Young
AU - Lee, Mina
AU - Choi, Jee Hyun
AU - Pak, James Jungho
AU - Lee, Sang Hoon
PY - 2011/1/1
Y1 - 2011/1/1
N2 - We describe here a simple and novel method to fabricate polyimide (PI) electrodes without a complex process to release completed PI electrodes from the substrates after full-curing process. We separated the PI electrodes from the Si-wafer prior to full-curing process, and these non full-cured electrodes were placed between the Kapton films, and we performed full-curing process with these sandwiched electrodes. Then, PI electrodes were easily and clearly released from the substrate without the sacrificial layers. We assessed the mechanical properties of fabricated electrodes comparing with non full-cured PI electrodes to investigate the full-curing effect between Kapton films. The electrical property was evaluated by measuring the impedance. Testing of the cyto-toxicity of full-cured electrodes using human mesenchymal stem cells (hMSCs) and mouse fibroblasts (L929) was carried out and the electrodes fabricated by proposed method were nontoxic and could be used as implantable electrodes. We also found that the electrodes, uniformly spread on the surface of mouse skulls while maintaining close contact, could successfully measure multichannel EEG signals.
AB - We describe here a simple and novel method to fabricate polyimide (PI) electrodes without a complex process to release completed PI electrodes from the substrates after full-curing process. We separated the PI electrodes from the Si-wafer prior to full-curing process, and these non full-cured electrodes were placed between the Kapton films, and we performed full-curing process with these sandwiched electrodes. Then, PI electrodes were easily and clearly released from the substrate without the sacrificial layers. We assessed the mechanical properties of fabricated electrodes comparing with non full-cured PI electrodes to investigate the full-curing effect between Kapton films. The electrical property was evaluated by measuring the impedance. Testing of the cyto-toxicity of full-cured electrodes using human mesenchymal stem cells (hMSCs) and mouse fibroblasts (L929) was carried out and the electrodes fabricated by proposed method were nontoxic and could be used as implantable electrodes. We also found that the electrodes, uniformly spread on the surface of mouse skulls while maintaining close contact, could successfully measure multichannel EEG signals.
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UR - http://www.scopus.com/inward/citedby.url?scp=79251647112&partnerID=8YFLogxK
U2 - 10.1007/s00542-010-1152-3
DO - 10.1007/s00542-010-1152-3
M3 - Article
AN - SCOPUS:79251647112
VL - 17
SP - 7
EP - 14
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 1
ER -