A fabrication technique for top-gate ZnO nanowire field-effect transistors by a photolithography process

Engineering & Materials Science

• Data storage equipment 8%
• Electric properties 14%
• Electrodes 10%
• Fabrication 59%
• Field effect transistors 85%
• Gates (transistor) 94%
• Metals 8%
• Nanowires 98%
• Photodetectors 17%
• Photolithography 100%
• Transconductance 15%

Physics & Astronomy

• electrical properties 7%
• electrodes 6%
• fabrication 48%
• field effect transistors 62%
• metals 5%
• nanowires 64%
• performance 4%
• photolithography 88%
• photometers 8%
• transconductance 10%

Chemical Compounds

• Behavior as Electrode 5%
• Electrical Property 8%
• Field Effect 79%
• Metal 4%
• Nanowire 69%
• Transconductance 15%