A facile fabrication of semiconductor nanowires gas sensor using PDMS patterning and solution deposition

In Sung Hwang, Yoon Sung Kim, Sun Jung Kim, Byeong Kwon Ju, Jong Heun Lee

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

This paper suggests a simple and cost-effective method for fabricating nanowire (NW) gas sensors. Oxide NWs were deposited uniformly over a defined electrode area by coating with a solution containing NWs after patterning with polydimethylsiloxane (PDMS). The hydrophobic PDMS guide wall prevented outstretching of the deposited solution, which allowed the density of the NWs in the sensor to be manipulated conveniently. The high-density NWs sensor enhanced the gas sensitivity toward CO, C3H8, C2H5OH, and NO2 but reduced the gas response and recovery speed. The correlation between the NW density and gas sensing characteristics are discussed in relation to the gas sensing mechanism.

Original languageEnglish
Pages (from-to)224-229
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume136
Issue number1
DOIs
Publication statusPublished - 2009 Feb 2

Keywords

  • Gas sensors
  • Nanowires network
  • Polydimethylsiloxane (PDMS) patterning
  • SnO nanowires
  • Solution deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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