The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)