Abstract
The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
| Original language | English |
|---|---|
| Article number | 203519 |
| Journal | Applied Physics Letters |
| Volume | 91 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 2007 Nov 23 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
A Lorentz force based fusion magnetometer-accelerometer with dual functions for the electronic compass. / Cho, Ji Man; Lee, Sang Yong; Kim, Soo-Won; Kim, Kyung Soo; An, Sengdo.
In: Applied Physics Letters, Vol. 91, No. 20, 203519, 23.11.2007.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - A Lorentz force based fusion magnetometer-accelerometer with dual functions for the electronic compass
AU - Cho, Ji Man
AU - Lee, Sang Yong
AU - Kim, Soo-Won
AU - Kim, Kyung Soo
AU - An, Sengdo
PY - 2007/11/23
Y1 - 2007/11/23
N2 - The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
AB - The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
UR - http://www.scopus.com/inward/record.url?scp=36248937075&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=36248937075&partnerID=8YFLogxK
U2 - 10.1063/1.2812566
DO - 10.1063/1.2812566
M3 - Article
AN - SCOPUS:36248937075
VL - 91
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 20
M1 - 203519
ER -