Abstract
The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.
| Original language | English |
|---|---|
| Article number | 203519 |
| Journal | Applied Physics Letters |
| Volume | 91 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 2007 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
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Cho, J. M., Lee, S. Y., Kim, S. W., Kim, K. S., & An, S. (2007). A Lorentz force based fusion magnetometer-accelerometer with dual functions for the electronic compass. Applied Physics Letters, 91(20), [203519]. https://doi.org/10.1063/1.2812566