A Lorentz force based fusion magnetometer-accelerometer with dual functions for the electronic compass

Ji Man Cho; Sang Yong Lee; Soo Won Kim; Kyung Soo Kim; Sengdo An

doi:10.1063/1.2812566

A Lorentz force based fusion magnetometer-accelerometer with dual functions for the electronic compass

Ji Man Cho, Sang Yong Lee, Soo Won Kim, Kyung Soo Kim, Sengdo An

Honorary professors

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.

Original language	English
Article number	203519
Journal	Applied Physics Letters
Volume	91
Issue number	20
DOIs	https://doi.org/10.1063/1.2812566
Publication status	Published - 2007

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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AB - The authors present a Lorentz force based fusion magnetometer- accelerometer, which can detect simultaneously both geomagnetic field and acceleration. The sensor is fabricated on a silicon-on-glass wafer and packaged by silicon-gold eutectic bonding. When 1 g and 0.35 G are applied to the sensor, the fabricated magnetometer-accelerometer has a sensitivity of 153 mVG in magnetic field sensing and a sensitivity of 400 mVg in acceleration sensing. The sensor performance is sufficient for resolving approximately 10° in the orientation angle and it can function as an electronic compass in portable navigators that must be small and have low cost, and low power.

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