A micro-electromechanical system based hydrogen gas sensor

E. B. Lee, C. H. Yeo, K. Shin, K. J. Lee, H. J. Lee, W. B. Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10-3 K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.

Original languageEnglish
Pages (from-to)1014-1018
Number of pages5
JournalSensor Letters
Volume6
Issue number6
DOIs
Publication statusPublished - 2008 Dec 1

Fingerprint

Chemical sensors
microelectromechanical systems
MEMS
Hydrogen
Electrodes
sensors
hydrogen
Gases
gases
Heating
Fabrication
electrodes
ceramics
Semiconductor materials
fabrication
heating
Substrates
selectivity

Keywords

  • Hydrogen
  • MEMS
  • SnO
  • Temperature coefficient of resistance

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Lee, E. B., Yeo, C. H., Shin, K., Lee, K. J., Lee, H. J., Lee, W. B., & Ju, B. K. (2008). A micro-electromechanical system based hydrogen gas sensor. Sensor Letters, 6(6), 1014-1018. https://doi.org/10.1166/sl.2008.552

A micro-electromechanical system based hydrogen gas sensor. / Lee, E. B.; Yeo, C. H.; Shin, K.; Lee, K. J.; Lee, H. J.; Lee, W. B.; Ju, Byeong Kwon.

In: Sensor Letters, Vol. 6, No. 6, 01.12.2008, p. 1014-1018.

Research output: Contribution to journalArticle

Lee, EB, Yeo, CH, Shin, K, Lee, KJ, Lee, HJ, Lee, WB & Ju, BK 2008, 'A micro-electromechanical system based hydrogen gas sensor', Sensor Letters, vol. 6, no. 6, pp. 1014-1018. https://doi.org/10.1166/sl.2008.552
Lee EB, Yeo CH, Shin K, Lee KJ, Lee HJ, Lee WB et al. A micro-electromechanical system based hydrogen gas sensor. Sensor Letters. 2008 Dec 1;6(6):1014-1018. https://doi.org/10.1166/sl.2008.552
Lee, E. B. ; Yeo, C. H. ; Shin, K. ; Lee, K. J. ; Lee, H. J. ; Lee, W. B. ; Ju, Byeong Kwon. / A micro-electromechanical system based hydrogen gas sensor. In: Sensor Letters. 2008 ; Vol. 6, No. 6. pp. 1014-1018.
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