A micro-electromechanical system based hydrogen gas sensor

E. B. Lee, C. H. Yeo, K. Shin, K. J. Lee, H. J. Lee, W. B. Lee, B. K. Ju

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4 Citations (Scopus)


We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H2 gas at 50-20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 × 10-3 K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 μm.

Original languageEnglish
Pages (from-to)1014-1018
Number of pages5
JournalSensor Letters
Issue number6
Publication statusPublished - 2008 Dec


  • Hydrogen
  • MEMS
  • SnO
  • Temperature coefficient of resistance

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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    Lee, E. B., Yeo, C. H., Shin, K., Lee, K. J., Lee, H. J., Lee, W. B., & Ju, B. K. (2008). A micro-electromechanical system based hydrogen gas sensor. Sensor Letters, 6(6), 1014-1018. https://doi.org/10.1166/sl.2008.552