A multisized piezoelectric microcantilever biosensor array with scaling down in two dimensions is presented as a multifunctional resonant cantilever-based sensor platform. The multisized microcantilever array allowed simultaneous sensing of the surface stress as well as mass. The adsorption-induced surface stress and resulting spring constant change were analyzed in the multisized microcantilever array, and a mass sensitivity in the femtogram regime was demonstrated. The array sensor was used to immobilize human IgG on its cantilever surface, suggesting that the dynamic and simultaneous analysis of both adsorption-induced mass and the surface stress is feasible.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)