A New Method of Forming a Thin Single-Crystal Silicon Diaphragm using Merged Epitaxial Lateral Overgrowth for Sensor Applications

James J. Pak, Gerold W. Neudeck, Abul E. Kabir, David W. Deroo, Steven E. Staller, James H. Logsdon

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8 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science