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A New Method of Forming a Thin Single-Crystal Silicon Diaphragm using Merged Epitaxial Lateral Overgrowth for Sensor Applications
James J. Pak, Gerold W. Neudeck, Abul E. Kabir, David W. Deroo, Steven E. Staller, James H. Logsdon
Research output: Contribution to journal › Article › peer-review
8
Citations
(Scopus)