Abstract
We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 158-161 |
| Number of pages | 4 |
| Volume | 2015-February |
| Edition | February |
| DOIs | |
| Publication status | Published - 2015 Feb 26 |
| Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22 |
Other
| Other | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 |
|---|---|
| Country | Portugal |
| City | Estoril |
| Period | 15/1/18 → 15/1/22 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials
Cite this
A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. / Son, Yoojin; Lee, Hyunjoo Jenny; Kim, Jeongyeon; Lee, Changjoon; Yoon, Eui Sung; Kim, Tae Geun; Cho, Il Joo.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 158-161 7050910.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery
AU - Son, Yoojin
AU - Lee, Hyunjoo Jenny
AU - Kim, Jeongyeon
AU - Lee, Changjoon
AU - Yoon, Eui Sung
AU - Kim, Tae Geun
AU - Cho, Il Joo
PY - 2015/2/26
Y1 - 2015/2/26
N2 - We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.
AB - We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.
UR - http://www.scopus.com/inward/record.url?scp=84931026406&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84931026406&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2015.7050910
DO - 10.1109/MEMSYS.2015.7050910
M3 - Conference contribution
AN - SCOPUS:84931026406
VL - 2015-February
SP - 158
EP - 161
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PB - Institute of Electrical and Electronics Engineers Inc.
ER -