A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery

Yoojin Son, Hyunjoo Jenny Lee, Jeongyeon Kim, Changjoon Lee, Eui Sung Yoon, Tae Geun Kim, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages158-161
Number of pages4
Volume2015-February
EditionFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
CountryPortugal
CityEstoril
Period15/1/1815/1/22

Fingerprint

Optical waveguides
neurons
Drug delivery
stimulation
Microfluidics
optical waveguides
Neurons
microelectromechanical systems
MEMS
delivery
drugs
Glass
probes
glass
spikes
recording
Fabrication
fabrication
Experiments

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Son, Y., Lee, H. J., Kim, J., Lee, C., Yoon, E. S., Kim, T. G., & Cho, I. J. (2015). A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 158-161). [7050910] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050910

A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. / Son, Yoojin; Lee, Hyunjoo Jenny; Kim, Jeongyeon; Lee, Changjoon; Yoon, Eui Sung; Kim, Tae Geun; Cho, Il Joo.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 158-161 7050910.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Son, Y, Lee, HJ, Kim, J, Lee, C, Yoon, ES, Kim, TG & Cho, IJ 2015, A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February edn, vol. 2015-February, 7050910, Institute of Electrical and Electronics Engineers Inc., pp. 158-161, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050910
Son Y, Lee HJ, Kim J, Lee C, Yoon ES, Kim TG et al. A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February ed. Vol. 2015-February. Institute of Electrical and Electronics Engineers Inc. 2015. p. 158-161. 7050910 https://doi.org/10.1109/MEMSYS.2015.7050910
Son, Yoojin ; Lee, Hyunjoo Jenny ; Kim, Jeongyeon ; Lee, Changjoon ; Yoon, Eui Sung ; Kim, Tae Geun ; Cho, Il Joo. / A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 158-161
@inproceedings{3b073908ddf84688b0da8742f99350e1,
title = "A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery",
abstract = "We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.",
author = "Yoojin Son and Lee, {Hyunjoo Jenny} and Jeongyeon Kim and Changjoon Lee and Yoon, {Eui Sung} and Kim, {Tae Geun} and Cho, {Il Joo}",
year = "2015",
month = "2",
day = "26",
doi = "10.1109/MEMSYS.2015.7050910",
language = "English",
volume = "2015-February",
pages = "158--161",
booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
edition = "February",

}

TY - GEN

T1 - A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery

AU - Son, Yoojin

AU - Lee, Hyunjoo Jenny

AU - Kim, Jeongyeon

AU - Lee, Changjoon

AU - Yoon, Eui Sung

AU - Kim, Tae Geun

AU - Cho, Il Joo

PY - 2015/2/26

Y1 - 2015/2/26

N2 - We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.

AB - We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.

UR - http://www.scopus.com/inward/record.url?scp=84931026406&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84931026406&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2015.7050910

DO - 10.1109/MEMSYS.2015.7050910

M3 - Conference contribution

AN - SCOPUS:84931026406

VL - 2015-February

SP - 158

EP - 161

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

PB - Institute of Electrical and Electronics Engineers Inc.

ER -