@inproceedings{3b073908ddf84688b0da8742f99350e1,
title = "A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery",
abstract = "We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.",
author = "Yoojin Son and Lee, {Hyunjoo Jenny} and Jeongyeon Kim and Changjoon Lee and Yoon, {Eui Sung} and Kim, {Tae Geun} and Cho, {Il Joo}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",
year = "2015",
month = feb,
day = "26",
doi = "10.1109/MEMSYS.2015.7050910",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "February",
pages = "158--161",
booktitle = "2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015",
edition = "February",
}