A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery

Yoojin Son, Hyunjoo Jenny Lee, Jeongyeon Kim, Changjoon Lee, Eui Sung Yoon, Tae Geun Kim, Il Joo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages158-161
Number of pages4
Volume2015-February
EditionFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
CountryPortugal
CityEstoril
Period15/1/1815/1/22

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Son, Y., Lee, H. J., Kim, J., Lee, C., Yoon, E. S., Kim, T. G., & Cho, I. J. (2015). A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 158-161). [7050910] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050910