A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery

Yoojin Son; Hyunjoo Jenny Lee; Jeongyeon Kim; Changjoon Lee; Eui Sung Yoon; Tae Geun Kim; Il Joo Cho

doi:10.1109/MEMSYS.2015.7050910

A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery

Yoojin Son, Hyunjoo Jenny Lee, Jeongyeon Kim, Changjoon Lee, Eui Sung Yoon, Tae Geun Kim, Il Joo Cho

School of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Citations (Scopus)

Abstract

We present a monolithically integrated multi-functional MEMS neural probe by integrating both an embedded microfluidic channel for drug delivery and a SU-8 optical waveguide for optical stimulation. In this work, we used a controlled glass reflow process to form an embedded glass layer which serves as both the cover for the microfluidic channel and the cladding layer for the optical waveguide. Using this simple fabrication process, we achieved a compact structure integrated with multiple stimulation modalities. Using our multifunctional neural probe, we demonstrated successful in vivo experiments by optically and chemically activating neurons and recording neural spike signals from individual neurons with a high SNR.

Original language	English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	158-161
Number of pages	4
Volume	2015-February
Edition	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050910
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/MEMSYS.2015.7050910

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Cite this

Son, Y., Lee, H. J., Kim, J., Lee, C., Yoon, E. S., Kim, T. G., & Cho, I. J. (2015). A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (February ed., Vol. 2015-February, pp. 158-161). [7050910] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050910

A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. / Son, Yoojin; Lee, Hyunjoo Jenny; Kim, Jeongyeon; Lee, Changjoon; Yoon, Eui Sung; Kim, Tae Geun; Cho, Il Joo.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 158-161 7050910.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Son, Y, Lee, HJ, Kim, J, Lee, C, Yoon, ES, Kim, TG & Cho, IJ 2015, A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February edn, vol. 2015-February, 7050910, Institute of Electrical and Electronics Engineers Inc., pp. 158-161, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050910

Son Y, Lee HJ, Kim J, Lee C, Yoon ES, Kim TG et al. A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). February ed. Vol. 2015-February. Institute of Electrical and Electronics Engineers Inc. 2015. p. 158-161. 7050910 https://doi.org/10.1109/MEMSYS.2015.7050910

Son, Yoojin ; Lee, Hyunjoo Jenny ; Kim, Jeongyeon ; Lee, Changjoon ; Yoon, Eui Sung ; Kim, Tae Geun ; Cho, Il Joo. / A new monolithically integrated multi-functional MEMS neural probe for optical stimulation and drug delivery. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). Vol. 2015-February February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 158-161

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