A new nonlinear self-tuning run-to-run controller for the semiconductor manufacturing process

Cheong Sool Park, Jun Seok Kim, Sang Hoon Park, Jae Jun Yun, Jun-Geol Baek

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In the paper, we propose a new nonlinear self-tuning run-to-run (R2R) controller for the semiconductor manufacturing process. Self-tuning R2R controllers evolved from linear to nonlinear through former studies. Although some nonlinear controllers have been introduced, they were not fully supported in the areas of nonlinear update and optimization. For that reason, the proposed controller has three characteristics. First, a simplified model which reduces complexity in estimating the state of the actual process is applied to describe the process. Second, the nonlinear recursive estimation algorithm using the extended Kalman filter process is applied to update the nonlinear model. Third, nonlinear optimization using a modified Levenberg-Marquardt algorithm is applied to calculate recipe or input vectors. The test results show that the proposed controller can bring quality characteristics closer to the target than other controllers.

Original languageEnglish
Pages (from-to)458-463
Number of pages6
JournalAdvanced Science Letters
Volume14
Issue number1
DOIs
Publication statusPublished - 2012 Jul 1

Fingerprint

Semiconductors
Semiconductor Manufacturing
Self-tuning
manufacturing
Tuning
Semiconductor materials
Controller
Controllers
Nonlinear Dynamics
Kalman filter
non-linear model
Update
Recursive Estimation
Levenberg-Marquardt Algorithm
Nonlinear Estimation
Extended Kalman filters
Recursive Algorithm
Nonlinear Optimization
Estimation Algorithms
Kalman Filter

Keywords

  • Constrained nonlinear optimization
  • Nonlinear recursive least square estimation
  • Nonlinear self-tuning R2R controller

ASJC Scopus subject areas

  • Education
  • Health(social science)
  • Mathematics(all)
  • Energy(all)
  • Computer Science(all)
  • Environmental Science(all)
  • Engineering(all)

Cite this

A new nonlinear self-tuning run-to-run controller for the semiconductor manufacturing process. / Park, Cheong Sool; Kim, Jun Seok; Park, Sang Hoon; Yun, Jae Jun; Baek, Jun-Geol.

In: Advanced Science Letters, Vol. 14, No. 1, 01.07.2012, p. 458-463.

Research output: Contribution to journalArticle

Park, Cheong Sool ; Kim, Jun Seok ; Park, Sang Hoon ; Yun, Jae Jun ; Baek, Jun-Geol. / A new nonlinear self-tuning run-to-run controller for the semiconductor manufacturing process. In: Advanced Science Letters. 2012 ; Vol. 14, No. 1. pp. 458-463.
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