A coplanar TFT structure has excellent characteristics in Δ Vp and channel length compared to conventional etch stopper TFT structure in AOS TFT LCD. In this paper, we introduce new 5 mask coplanar structure which reduces two mask steps compared to conventional 7 mask process. And we fabricated 4.5-inch HD resolution panel in our R&D line with our new structure, and its transmittance is 12.5% improved by eliminating contact hole pattern.
|Title of host publication||Digest of Technical Papers - SID International Symposium|
|Publisher||Blackwell Publishing Ltd|
|Number of pages||4|
|Publication status||Published - 2014|
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