A nickel silicide nanowire microscopy tip obtains nanoscale information

Joondong Kim, Young Hyun Shin, Ju Hyung Yun, Chang Soo Han, Moon Seop Hyun, Wayne A. Anderson

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.

Original languageEnglish
Article number485713
JournalNanotechnology
Volume19
Issue number48
DOIs
Publication statusPublished - 2008 Dec 3
Externally publishedYes

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ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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