A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics

Ey Goo Kang, Seung Hyun Moon, Man Young Sung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new Lateral Trench Insulated Gate Bipolar Transistor (LTIGBT) with p+ diverter was proposed to improve the characteristics of the conventional LTIGBT. The p+ divert layer was placed between anode electrode region and cathode electrode. Generally, if the LTIGBT had p+ divert region, forward blocking voltage was decreased, greatly because n-drift layer corresponding to punchthrough was decreased. However, the forward blocking voltage of the proposed LTIGBT with p+ diverter was 140 V. That of the conventional LTIGBT of the same size was 105 V. The forward blocking voltage of LTIGBT with p+ diverter increased 1.3 times more than those of the conventional LTIGBT. Because the p+ diverter region of the proposed device was enclosed trench oxide layer, the electric field moved toward trench-oxide layer. The latch-up current densities of the conventional LTIGBT and LTIGBT with p+ diverter were 540 A/cm2, and 1453 A/cm2, respectively. The enhanced latch-up capability of the LTEIGBT was obtained through holes in the current directly reaching the cathode via the p+ divert region and p+ cathode layer beneath n+ cathode layer.

Original languageEnglish
Title of host publication2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages139-142
Number of pages4
Volume1
ISBN (Electronic)0780365208, 9780780365209
DOIs
Publication statusPublished - 2001
Event6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Shanghai, China
Duration: 2001 Oct 222001 Oct 25

Other

Other6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001
CountryChina
CityShanghai
Period01/10/2201/10/25

Fingerprint

Insulated gate bipolar transistors (IGBT)
Cathodes
Oxides
Electric potential
Electrodes
Anodes
Current density
Electric fields

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Kang, E. G., Moon, S. H., & Sung, M. Y. (2001). A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics. In 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings (Vol. 1, pp. 139-142). [981442] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2001.981442

A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics. / Kang, Ey Goo; Moon, Seung Hyun; Sung, Man Young.

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. p. 139-142 981442.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kang, EG, Moon, SH & Sung, MY 2001, A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics. in 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. vol. 1, 981442, Institute of Electrical and Electronics Engineers Inc., pp. 139-142, 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001, Shanghai, China, 01/10/22. https://doi.org/10.1109/ICSICT.2001.981442
Kang EG, Moon SH, Sung MY. A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics. In 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. Vol. 1. Institute of Electrical and Electronics Engineers Inc. 2001. p. 139-142. 981442 https://doi.org/10.1109/ICSICT.2001.981442
Kang, Ey Goo ; Moon, Seung Hyun ; Sung, Man Young. / A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics. 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. pp. 139-142
@inproceedings{94066319a05249f4bc93a4e4ea119394,
title = "A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics",
abstract = "A new Lateral Trench Insulated Gate Bipolar Transistor (LTIGBT) with p+ diverter was proposed to improve the characteristics of the conventional LTIGBT. The p+ divert layer was placed between anode electrode region and cathode electrode. Generally, if the LTIGBT had p+ divert region, forward blocking voltage was decreased, greatly because n-drift layer corresponding to punchthrough was decreased. However, the forward blocking voltage of the proposed LTIGBT with p+ diverter was 140 V. That of the conventional LTIGBT of the same size was 105 V. The forward blocking voltage of LTIGBT with p+ diverter increased 1.3 times more than those of the conventional LTIGBT. Because the p+ diverter region of the proposed device was enclosed trench oxide layer, the electric field moved toward trench-oxide layer. The latch-up current densities of the conventional LTIGBT and LTIGBT with p+ diverter were 540 A/cm2, and 1453 A/cm2, respectively. The enhanced latch-up capability of the LTEIGBT was obtained through holes in the current directly reaching the cathode via the p+ divert region and p+ cathode layer beneath n+ cathode layer.",
author = "Kang, {Ey Goo} and Moon, {Seung Hyun} and Sung, {Man Young}",
year = "2001",
doi = "10.1109/ICSICT.2001.981442",
language = "English",
volume = "1",
pages = "139--142",
booktitle = "2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - GEN

T1 - A novel lateral trench IGBT employing the p+ diverter having superior forward blocking and latch-up characteristics

AU - Kang, Ey Goo

AU - Moon, Seung Hyun

AU - Sung, Man Young

PY - 2001

Y1 - 2001

N2 - A new Lateral Trench Insulated Gate Bipolar Transistor (LTIGBT) with p+ diverter was proposed to improve the characteristics of the conventional LTIGBT. The p+ divert layer was placed between anode electrode region and cathode electrode. Generally, if the LTIGBT had p+ divert region, forward blocking voltage was decreased, greatly because n-drift layer corresponding to punchthrough was decreased. However, the forward blocking voltage of the proposed LTIGBT with p+ diverter was 140 V. That of the conventional LTIGBT of the same size was 105 V. The forward blocking voltage of LTIGBT with p+ diverter increased 1.3 times more than those of the conventional LTIGBT. Because the p+ diverter region of the proposed device was enclosed trench oxide layer, the electric field moved toward trench-oxide layer. The latch-up current densities of the conventional LTIGBT and LTIGBT with p+ diverter were 540 A/cm2, and 1453 A/cm2, respectively. The enhanced latch-up capability of the LTEIGBT was obtained through holes in the current directly reaching the cathode via the p+ divert region and p+ cathode layer beneath n+ cathode layer.

AB - A new Lateral Trench Insulated Gate Bipolar Transistor (LTIGBT) with p+ diverter was proposed to improve the characteristics of the conventional LTIGBT. The p+ divert layer was placed between anode electrode region and cathode electrode. Generally, if the LTIGBT had p+ divert region, forward blocking voltage was decreased, greatly because n-drift layer corresponding to punchthrough was decreased. However, the forward blocking voltage of the proposed LTIGBT with p+ diverter was 140 V. That of the conventional LTIGBT of the same size was 105 V. The forward blocking voltage of LTIGBT with p+ diverter increased 1.3 times more than those of the conventional LTIGBT. Because the p+ diverter region of the proposed device was enclosed trench oxide layer, the electric field moved toward trench-oxide layer. The latch-up current densities of the conventional LTIGBT and LTIGBT with p+ diverter were 540 A/cm2, and 1453 A/cm2, respectively. The enhanced latch-up capability of the LTEIGBT was obtained through holes in the current directly reaching the cathode via the p+ divert region and p+ cathode layer beneath n+ cathode layer.

UR - http://www.scopus.com/inward/record.url?scp=84966534278&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84966534278&partnerID=8YFLogxK

U2 - 10.1109/ICSICT.2001.981442

DO - 10.1109/ICSICT.2001.981442

M3 - Conference contribution

AN - SCOPUS:84966534278

VL - 1

SP - 139

EP - 142

BT - 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

ER -