A novel micro-gas sensor using laterally grown carbon nanotubes

Yoon Taek Jang, Chang Hoon Choi, Seung Il Moon, Jin Ho Ahn, Yun-Hi Lee, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We experimentally present the multiwalled carbon (MWNT) based gas sensor by a direct nano-wiring between Nb electrodes. Upon exposure MWNT to NH3, the electrical resistance of the MWNTs is found to increase. The increase of temperature and gas concentration actually reduces the response time and increases the sensitivity to introduction of gas, respectively. Our results show a promising technique for forming CNT bridges between electrodes for chemical gas sensor at room temperature.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1363-1366
Number of pages4
Volume2
ISBN (Print)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Carbon nanotubes
  • Chemical sensors
  • Chemical vapor deposition
  • Electric resistance
  • Electrodes
  • Gas detectors
  • Gases
  • Niobium
  • Scanning electron microscopy
  • Temperature sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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