@inproceedings{9e28f8ffe37f44edbd6c5b166d08de04,
title = "A novel microneedle array integrated with a PDMS biochip for microfluid systems",
abstract = "This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.",
keywords = "Anisotropic magnetoresistance, Dry etching, In vitro, In vivo, Ink, Mechanical factors, Mice, Microchannel, Shafts, Testing",
author = "Paik, {Seung Joon} and Lim, {Jung Min} and Ilwoo Jung and Yonghwa Park and Sangwon Byun and Seok Chung and Kukjin Chun and Junkeun Chang and Cho, {Dongil Dan}",
year = "2003",
doi = "10.1109/SENSOR.2003.1217048",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1446--1449",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}