Abstract
This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1446-1449 |
| Number of pages | 4 |
| Volume | 2 |
| ISBN (Print) | 0780377311, 9780780377318 |
| DOIs | |
| Publication status | Published - 2003 |
| Externally published | Yes |
| Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Other
| Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
|---|---|
| Country | United States |
| City | Boston |
| Period | 03/6/8 → 03/6/12 |
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Keywords
- Anisotropic magnetoresistance
- Dry etching
- In vitro
- In vivo
- Ink
- Mechanical factors
- Mice
- Microchannel
- Shafts
- Testing
ASJC Scopus subject areas
- Electrical and Electronic Engineering
Cite this
A novel microneedle array integrated with a PDMS biochip for microfluid systems. / Paik, Seung Joon; Lim, Jung Min; Jung, Ilwoo; Park, Yonghwa; Byun, Sangwon; Chung, Seok; Chun, Kukjin; Chang, Junkeun; Cho, Dongil Dan.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Vol. 2 Institute of Electrical and Electronics Engineers Inc., 2003. p. 1446-1449 1217048.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - A novel microneedle array integrated with a PDMS biochip for microfluid systems
AU - Paik, Seung Joon
AU - Lim, Jung Min
AU - Jung, Ilwoo
AU - Park, Yonghwa
AU - Byun, Sangwon
AU - Chung, Seok
AU - Chun, Kukjin
AU - Chang, Junkeun
AU - Cho, Dongil Dan
PY - 2003
Y1 - 2003
N2 - This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.
AB - This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.
KW - Anisotropic magnetoresistance
KW - Dry etching
KW - In vitro
KW - In vivo
KW - Ink
KW - Mechanical factors
KW - Mice
KW - Microchannel
KW - Shafts
KW - Testing
UR - http://www.scopus.com/inward/record.url?scp=84899837398&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84899837398&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2003.1217048
DO - 10.1109/SENSOR.2003.1217048
M3 - Conference contribution
AN - SCOPUS:84899837398
SN - 0780377311
SN - 9780780377318
VL - 2
SP - 1446
EP - 1449
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
ER -