A novel microneedle array integrated with a PDMS biochip for microfluid systems

Seung Joon Paik, Jung Min Lim, Ilwoo Jung, Yonghwa Park, Sangwon Byun, Seok Chung, Kukjin Chun, Junkeun Chang, Dongil Dan Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper reports a novel single-crystal-silicon microneedle array, its mechanical properties, its integration with a polydimethylsiloxane (PDMS) biochip, as well as in vitro and in vivo test results. The fabricated microneedle arrays have integrated microchannels, which are fabricated by using the processes of anisotropic dry etching, isotropic dry etching, and trench-refilling. The microchannel diameter is about 20 μm. The 2 mm-length microneedle shaft is strong enough to endure 12.6 gf (=23.5 mN) of vertical loading. The fabricated microneedles are planar, which make it easy to integrate with biofluidic devices. As an in vitro test, the microneedle array is integrated with a PDMS biochip, and black ink is injected into a methanol-filled petri dish. The microneedle is tested in vivo by penetrating the mouse skin and precisely pricking into the small vein in the mouse tail.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1446-1449
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Anisotropic magnetoresistance
  • Dry etching
  • In vitro
  • In vivo
  • Ink
  • Mechanical factors
  • Mice
  • Microchannel
  • Shafts
  • Testing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Paik, S. J., Lim, J. M., Jung, I., Park, Y., Byun, S., Chung, S., Chun, K., Chang, J., & Cho, D. D. (2003). A novel microneedle array integrated with a PDMS biochip for microfluid systems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1446-1449). [1217048] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1217048