A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon

Yun Kwon Park, Yong Kook Kim, Hoon Kim, Duck Jung Lee, Chul Ju Kim, Byeong Kwon Ju, Jong Oh Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

In this paper, as ultra thin silicon substrate was used as packaging substrate, we proposed ultra thin chip size RF-MEMS packaging technology that has vertical feed-through for low loss, as reduced the parasitic capacity. Thin silicon wafer with 50um thickness was fabricated to achieve short electric path, low loss and lightweight. And then via holes with the diameter of 60um were fabricated and was filled by the RIE and electroplating process. Also, the wafer level bumps were fabricated for simple, low cost, and fine patterning process. The measured S-parameter of packaged CPW(Co-planner waveguide) has the reflection loss of under -19 dB and the insertion loss of -0.54 -0.67 dB.

Original languageEnglish
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages618-621
Number of pages4
Publication statusPublished - 2003 Jul 23
Externally publishedYes
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

Fingerprint

MEMS
Packaging
Silicon
Reactive ion etching
Scattering parameters
Electroplating
Substrates
Insertion losses
Silicon wafers
Waveguides
Costs

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Park, Y. K., Kim, Y. K., Kim, H., Lee, D. J., Kim, C. J., Ju, B. K., & Park, J. O. (2003). A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 618-621)

A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon. / Park, Yun Kwon; Kim, Yong Kook; Kim, Hoon; Lee, Duck Jung; Kim, Chul Ju; Ju, Byeong Kwon; Park, Jong Oh.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 618-621.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, YK, Kim, YK, Kim, H, Lee, DJ, Kim, CJ, Ju, BK & Park, JO 2003, A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). pp. 618-621, IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, 03/1/19.
Park YK, Kim YK, Kim H, Lee DJ, Kim CJ, Ju BK et al. A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. p. 618-621
Park, Yun Kwon ; Kim, Yong Kook ; Kim, Hoon ; Lee, Duck Jung ; Kim, Chul Ju ; Ju, Byeong Kwon ; Park, Jong Oh. / A novel thin chip scale packaging of the RF-MEMS devices using ultra thin silicon. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). 2003. pp. 618-621
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