A reaction model for plasma coating of nanoparticles in hydrocarbon plasma

Alexander Yarin, Beniamino Rovagnati, Farzad Mashayek, Themis Matsoukas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A detailed chemical kinetics scheme of the reactions occurring in a CH4/H2 plasma is used to model the deposition of amorphous carbon films onto submicron particle suspended in the plasma. The model includes electron-neutral, ion-neutral and neutral-neutral reactions and solves for the radial distribution of species in the vicinity of the particle. Concentration profiles are obtained by solving simultaneously the diffusion equation for all species that deposit on the particle surface, and the Poisson equation for the charge-carrying species. To accommodate the low-pressure environment, the continuum equations are solved to within one mean-free path from the particle surface while kinetic theory is used to treat phenomena inside the vacuum sphere, namely, at distances shorter than one mean-free path. The solution is then obtained by matching the kinetic and continuum calculations at the edge of the vacuum sphere. The calculation produces the distributions of charged and non-charged species, the mean particle charge, and the deposition rate of hydrogenated amorphous carbon. We present calculations at various plasma conditions and discuss the results and the observed trends in light of available experimental data.

Original languageEnglish
Title of host publicationAIChE Annual Meeting, Conference Proceedings
Publication statusPublished - 2005 Dec 1
Event05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States
Duration: 2005 Oct 302005 Nov 4

Other

Other05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
CountryUnited States
CityCincinnati, OH
Period05/10/3005/11/4

Fingerprint

Hydrocarbons
Amorphous carbon
Nanoparticles
Plasmas
Coatings
Vacuum
Kinetic theory
Carbon films
Poisson equation
Amorphous films
Deposition rates
Reaction kinetics
Deposits
Kinetics
Electrons
Ions

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yarin, A., Rovagnati, B., Mashayek, F., & Matsoukas, T. (2005). A reaction model for plasma coating of nanoparticles in hydrocarbon plasma. In AIChE Annual Meeting, Conference Proceedings

A reaction model for plasma coating of nanoparticles in hydrocarbon plasma. / Yarin, Alexander; Rovagnati, Beniamino; Mashayek, Farzad; Matsoukas, Themis.

AIChE Annual Meeting, Conference Proceedings. 2005.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yarin, A, Rovagnati, B, Mashayek, F & Matsoukas, T 2005, A reaction model for plasma coating of nanoparticles in hydrocarbon plasma. in AIChE Annual Meeting, Conference Proceedings. 05AIChE: 2005 AIChE Annual Meeting and Fall Showcase, Cincinnati, OH, United States, 05/10/30.
Yarin A, Rovagnati B, Mashayek F, Matsoukas T. A reaction model for plasma coating of nanoparticles in hydrocarbon plasma. In AIChE Annual Meeting, Conference Proceedings. 2005
Yarin, Alexander ; Rovagnati, Beniamino ; Mashayek, Farzad ; Matsoukas, Themis. / A reaction model for plasma coating of nanoparticles in hydrocarbon plasma. AIChE Annual Meeting, Conference Proceedings. 2005.
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