A simple approach in fabricating chemical sensor using laterally grown multi-walled carbon nanotubes

Yoon Taek Jang, Seung Il Moon, Jin Ho Ahn, Yun Hi Lee, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

102 Citations (Scopus)

Abstract

In this work, we proposed a new process for fabricating chemical sensors employing multi-walled carbon nanotubes (MWNTs) as the active sensing element. The MWNTs were selectively grown between lateral sides of the catalytic metals on pre-defined Nb electrodes. Upon exposure to air or NH3, the electrical resistance of the MWNTs is found to decrease or increase, respectively. The response time decreases and the sensitivity increases while measurement temperature and gas concentration increase. Though there are a few technical problems to be solved, our results show a promising technique for chemical gas sensor.

Original languageEnglish
Pages (from-to)118-122
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume99
Issue number1
DOIs
Publication statusPublished - 2004 Apr 15

Keywords

  • CVD
  • Gas sensor
  • Lateral growth
  • Multi-walled carbon nanotube

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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