A study on dielectric characteristics of fluorinated polyimide thin film

Soo J. Park, Ki Sook Cho, Sung Hyun Kim

Research output: Contribution to journalArticle

49 Citations (Scopus)

Abstract

In this work, the effects of fluorination of polyimide thin films on surface and dielectric characteristics were studied using X-ray photoelectron spectroscopy (XPS) and dielectric spectrometry, respectively. The thermal and mechanical properties of the film were characterized by thermogravimetric analysis (TGA) and tensile strengths, respectively. The fluorine content of the polyimide thin film was increased with increasing treatment concentration, resulting in decreasing dielectric constant of the film. It was found that the replacement of fluorine led to the decrease of the local electronic polarizability of polyimide, or to the increase of the free volume, which can be attributed to the relatively large size of fluorine. Nevertheless, the fluorination did not significantly affect thermal or mechanical properties of the polyimide film under mild conditions in this system.

Original languageEnglish
Pages (from-to)384-390
Number of pages7
JournalJournal of Colloid and Interface Science
Volume272
Issue number2
DOIs
Publication statusPublished - 2004 Apr 15

Fingerprint

polyimides
Polyimides
Fluorine
fluorine
Thin films
Fluorination
fluorination
thin films
Thermodynamic properties
thermodynamic properties
mechanical properties
Mechanical properties
Free volume
tensile strength
Spectrometry
Thermogravimetric analysis
Permittivity
Tensile strength
X ray photoelectron spectroscopy
photoelectron spectroscopy

Keywords

  • Dielectric constant
  • Fluorination
  • Mechanical properties
  • Polyimide
  • Thermal properties

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry
  • Surfaces and Interfaces

Cite this

A study on dielectric characteristics of fluorinated polyimide thin film. / Park, Soo J.; Cho, Ki Sook; Kim, Sung Hyun.

In: Journal of Colloid and Interface Science, Vol. 272, No. 2, 15.04.2004, p. 384-390.

Research output: Contribution to journalArticle

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