A study on dielectric characteristics of fluorinated polyimide thin film

Soo Jin Park, Ki Sook Cho, Sung Hyun Kim

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

In this work, the effects of fluorination of polyimide thin films on surface and dielectric characteristics were studied using X-ray photoelectron spectroscopy (XPS) and dielectric spectrometry, respectively. The thermal and mechanical properties of the film were characterized by thermogravimetric analysis (TGA) and tensile strengths, respectively. The fluorine content of the polyimide thin film was increased with increasing treatment concentration, resulting in decreasing dielectric constant of the film. It was found that the replacement of fluorine led to the decrease of the local electronic polarizability of polyimide, or to the increase of the free volume, which can be attributed to the relatively large size of fluorine. Nevertheless, the fluorination did not significantly affect thermal or mechanical properties of the polyimide film under mild conditions in this system.

Original languageEnglish
Pages (from-to)384-390
Number of pages7
JournalJournal of Colloid and Interface Science
Volume272
Issue number2
DOIs
Publication statusPublished - 2004 Apr 15

Keywords

  • Dielectric constant
  • Fluorination
  • Mechanical properties
  • Polyimide
  • Thermal properties

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Surfaces, Coatings and Films
  • Colloid and Surface Chemistry

Fingerprint Dive into the research topics of 'A study on dielectric characteristics of fluorinated polyimide thin film'. Together they form a unique fingerprint.

  • Cite this