A study on the aluminum fire-through to a-SiNx: H thin film for crystalline solar cells

Jooyong Song, Sungeun Park, Soonwoo Kwon, Sungtak Kim, Hyunho Kim, Sung Ju Tark, Sewang Yoon, Donghwan Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The relationship between aluminum fire-through and the properties of a-SiNx:H thin films was investigated to aid their use as dielectric layers in rear side and front passivation layers in crystalline solar cells. Aluminum fire-through was shown to depend on the refractive index and the deposition rate of the films. Refractive index, density and deposition rate increased with increasing SiH4/NH3 ratio, while the etching rate decreased. Aluminum fire-through occurred in a sample of refractive index 2.0 during fast deposition but not when the deposition rate was slow. Aluminum fire-through occurred during extended firing, despite it not occurring during normal firing by RTP. The results of this work demonstrate that refractive index was the major determinant of aluminum fire-through, and that the aluminum and the a-SiNx:H thin film reacted immediately at the beginning of firing at a rate determined by the deposition rate.

Original languageEnglish
Pages (from-to)313-318
Number of pages6
JournalCurrent Applied Physics
Volume12
Issue number1
DOIs
Publication statusPublished - 2012 Jan 1

Fingerprint

Aluminum
Solar cells
Fires
solar cells
Crystalline materials
Deposition rates
aluminum
Thin films
Refractive index
thin films
refractivity
Passivation
determinants
passivity
Etching
etching

Keywords

  • Aluminum
  • Back surface field
  • Local contact
  • Rear passivation
  • Silicon nitride
  • Solar cell

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

A study on the aluminum fire-through to a-SiNx : H thin film for crystalline solar cells. / Song, Jooyong; Park, Sungeun; Kwon, Soonwoo; Kim, Sungtak; Kim, Hyunho; Tark, Sung Ju; Yoon, Sewang; Kim, Donghwan.

In: Current Applied Physics, Vol. 12, No. 1, 01.01.2012, p. 313-318.

Research output: Contribution to journalArticle

Song, Jooyong ; Park, Sungeun ; Kwon, Soonwoo ; Kim, Sungtak ; Kim, Hyunho ; Tark, Sung Ju ; Yoon, Sewang ; Kim, Donghwan. / A study on the aluminum fire-through to a-SiNx : H thin film for crystalline solar cells. In: Current Applied Physics. 2012 ; Vol. 12, No. 1. pp. 313-318.
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