A unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition

B. L. Chua, Z. Li, D. T. McCormick, W. P. Shih, N. C. Tien, A. S. Wexler, D. A. Niemeier, B. Holmen

Research output: Contribution to journalConference article

8 Citations (Scopus)

Abstract

To miniaturize airborne particulates sizing and counting apparatus for ubiquitous deployment in air quality monitoring and epidemiological studies, we developed a unipolar corona discharge microfabricated ionizer structure for gases at atmospheric pressure and composition. It consumes relatively low power at 150mW or less, and operates with either single or multiple discharge electrodes. Potential difference of several kilovolts is maintained between the discharge electrodes within a chip size of less than 1 cm2 without substrate breakdown or undesired sparkover. Mechanical oscillation of discharge electrode due to elecrrohydrodynamic effects is minimized. Corona charging currents of more than 40μA was achieved before streamers breakdown. Laplacian field simulation for both single and dual cathode design was performed using ANSYS™.

Original languageEnglish
Pages (from-to)261-264
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication statusPublished - 2004
Externally publishedYes
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 252004 Jan 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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