Abnormal dopant distribution in POCl3-diffused N+ emitter of textured silicon solar cells

Young Woo Ok, Ajeet Rohatgi, Yeon Ho Kil, Sung Eun Park, Donghwan Kim, Joon Sung Lee, Chel Jong Choi

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

We investigated 2-D dopant distribution in a POCl3 -diffused n+ emitter formed on textured Si solar cells using transmission electron microscopy (TEM) combined with selective chemical etching. TEM and simulation results demonstrate that the convex and concave regions of a pyramid in the textured Si surface show deeper and shallower junctions, respectively. By considering a strong dependence of phosphorus (P) diffusion on the Si interstitials, the abnormal profile of n+ emitter in the textured Si surface could be attributed to the inhomogeneous distribution of Si interstitials caused by the geometry of the pyramid texture.

Original languageEnglish
Article number5680936
Pages (from-to)351-353
Number of pages3
JournalIEEE Electron Device Letters
Volume32
Issue number3
DOIs
Publication statusPublished - 2011 Mar 1

Fingerprint

Silicon solar cells
Doping (additives)
Transmission electron microscopy
Phosphorus
Etching
Solar cells
Textures
Geometry

Keywords

  • Junction
  • selective chemical etching
  • Si interstitial
  • solar cells
  • transmission electron microscopy (TEM)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Ok, Y. W., Rohatgi, A., Kil, Y. H., Park, S. E., Kim, D., Lee, J. S., & Choi, C. J. (2011). Abnormal dopant distribution in POCl3-diffused N+ emitter of textured silicon solar cells. IEEE Electron Device Letters, 32(3), 351-353. [5680936]. https://doi.org/10.1109/LED.2010.2098840

Abnormal dopant distribution in POCl3-diffused N+ emitter of textured silicon solar cells. / Ok, Young Woo; Rohatgi, Ajeet; Kil, Yeon Ho; Park, Sung Eun; Kim, Donghwan; Lee, Joon Sung; Choi, Chel Jong.

In: IEEE Electron Device Letters, Vol. 32, No. 3, 5680936, 01.03.2011, p. 351-353.

Research output: Contribution to journalArticle

Ok, Young Woo ; Rohatgi, Ajeet ; Kil, Yeon Ho ; Park, Sung Eun ; Kim, Donghwan ; Lee, Joon Sung ; Choi, Chel Jong. / Abnormal dopant distribution in POCl3-diffused N+ emitter of textured silicon solar cells. In: IEEE Electron Device Letters. 2011 ; Vol. 32, No. 3. pp. 351-353.
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