Activation kinetics of implanted Si+ in GaN and application to fabricating lateral Schottky diodes

Y. Irokawa, Jihyun Kim, F. Ren, K. H. Baik, B. P. Gila, C. R. Abernathy, S. J. Pearton, C. C. Pan, G. T. Chen, J. I. Chyi

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Physics & Astronomy