Bimorph cantilevers were fabricated by using the piezoelectric polymer [poly(vinylidenefluoride), PVDF, β phase] for the active layers and the highly conducting polymer [poly(3,4-ethylenedioxy thiophene)/poly(4- styrenesulfonate), PEDOT/PSS] for the electrodes. In order to make the hydrophilic layer and diffusion barrier on the polymers, the films were modified by an ion-assisted-reaction (IAR) method. The surface energy of the IAR-treated samples was calculated from the measured contact angles. The hydrophilic groups on the IAR-treated samples were verified by X-ray photoelectron spectroscopy (XPS) analysis. In order to confirm the penetration of the epoxy adhesive into the PEDOT/PSS (DMSO as solvent) film, the XPS and the scanning electron microscopy (SEM) images were analyzed. To fabricate the bimorph cantilevers, the two active PVDF layers both having the PEDOT/PSS (DMSO) electrodes were bonded by using epoxy adhesive. The displacement of the cantilevers was measured at the resonance frequency, and the actuation of the device made with the IAR-treated electrode was higher than that of the device made with the pristine electrode.
|Number of pages||4|
|Journal||Journal of the Korean Physical Society|
|Publication status||Published - 2004 Sep 1|
ASJC Scopus subject areas
- Physics and Astronomy(all)