Al-Si-N/a-SiN

H thin-film coating for polycarbonate glazing applications

Sehoon An, Geun Hyuk Lee, Seong Woo Jang, Young Woo Kim, Sang Ho Lim, Donghwan Kim, Seunghee Han

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

To improve the scratch resistance and UV weatherability of polycarbonate (PC), a protective layer consisting of a transparent Al-Si-N thin film of high hardness and a UV-blocking a-SiN:H (hydrogenated amorphous Si-N) thin film was studied using inductively coupled plasma-assisted reactive magnetron sputtering at room temperature. Transparent and hard Al-Si-N thin films with Si contents of 5-45 at% were deposited and characterized. Further, to protect PC from UV radiation below 300 nm in wavelength, UV-blocking a-SiN:H thin films were deposited at different H2 flow rates ranging from 2 to 8 sccm. The average transmittance of 460 nm thick Al-Si-N thin films was measured to be greater than 80% in the visible spectral range, and the maximum hardness of 31 GPa was obtained at 24 at% Si content. The UV transmittance of 140 nm thick a-SiN:H thin films was found to be less than 3% at wavelengths shorter than 300 nm. The double-layer structure of Al-Si-N (460 nm)/a-SiN:H (140 nm) showed a hardness of 29 GPa and an average transmittance of 78% for visible light along with a UV transmittance of less than 3%. In this study, the protective coating layer deposition for PC glazing applications was developed and characterized.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalMetals and Materials International
DOIs
Publication statusAccepted/In press - 2016 Apr 9

Fingerprint

polycarbonate
polycarbonates
Polycarbonates
coatings
Thin films
Coatings
transmittance
thin films
hardness
Hardness
Wavelength
protective coatings
Reactive sputtering
Protective coatings
Inductively coupled plasma
wavelengths
Ultraviolet radiation
Magnetron sputtering
magnetron sputtering
flow velocity

Keywords

  • Al-Si-N
  • hardness test
  • optical properties
  • polycarbonate glazaing
  • sputtering

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Metals and Alloys
  • Mechanics of Materials
  • Materials Chemistry

Cite this

Al-Si-N/a-SiN : H thin-film coating for polycarbonate glazing applications. / An, Sehoon; Lee, Geun Hyuk; Jang, Seong Woo; Kim, Young Woo; Lim, Sang Ho; Kim, Donghwan; Han, Seunghee.

In: Metals and Materials International, 09.04.2016, p. 1-9.

Research output: Contribution to journalArticle

An, Sehoon ; Lee, Geun Hyuk ; Jang, Seong Woo ; Kim, Young Woo ; Lim, Sang Ho ; Kim, Donghwan ; Han, Seunghee. / Al-Si-N/a-SiN : H thin-film coating for polycarbonate glazing applications. In: Metals and Materials International. 2016 ; pp. 1-9.
@article{819f9865a7f6476ab4f41607c33349b9,
title = "Al-Si-N/a-SiN: H thin-film coating for polycarbonate glazing applications",
abstract = "To improve the scratch resistance and UV weatherability of polycarbonate (PC), a protective layer consisting of a transparent Al-Si-N thin film of high hardness and a UV-blocking a-SiN:H (hydrogenated amorphous Si-N) thin film was studied using inductively coupled plasma-assisted reactive magnetron sputtering at room temperature. Transparent and hard Al-Si-N thin films with Si contents of 5-45 at{\%} were deposited and characterized. Further, to protect PC from UV radiation below 300 nm in wavelength, UV-blocking a-SiN:H thin films were deposited at different H2 flow rates ranging from 2 to 8 sccm. The average transmittance of 460 nm thick Al-Si-N thin films was measured to be greater than 80{\%} in the visible spectral range, and the maximum hardness of 31 GPa was obtained at 24 at{\%} Si content. The UV transmittance of 140 nm thick a-SiN:H thin films was found to be less than 3{\%} at wavelengths shorter than 300 nm. The double-layer structure of Al-Si-N (460 nm)/a-SiN:H (140 nm) showed a hardness of 29 GPa and an average transmittance of 78{\%} for visible light along with a UV transmittance of less than 3{\%}. In this study, the protective coating layer deposition for PC glazing applications was developed and characterized.",
keywords = "Al-Si-N, hardness test, optical properties, polycarbonate glazaing, sputtering",
author = "Sehoon An and Lee, {Geun Hyuk} and Jang, {Seong Woo} and Kim, {Young Woo} and Lim, {Sang Ho} and Donghwan Kim and Seunghee Han",
year = "2016",
month = "4",
day = "9",
doi = "10.1007/s12540-016-5492-0",
language = "English",
pages = "1--9",
journal = "Metals and Materials International",
issn = "1598-9623",
publisher = "Korean Institute of Metals and Materials",

}

TY - JOUR

T1 - Al-Si-N/a-SiN

T2 - H thin-film coating for polycarbonate glazing applications

AU - An, Sehoon

AU - Lee, Geun Hyuk

AU - Jang, Seong Woo

AU - Kim, Young Woo

AU - Lim, Sang Ho

AU - Kim, Donghwan

AU - Han, Seunghee

PY - 2016/4/9

Y1 - 2016/4/9

N2 - To improve the scratch resistance and UV weatherability of polycarbonate (PC), a protective layer consisting of a transparent Al-Si-N thin film of high hardness and a UV-blocking a-SiN:H (hydrogenated amorphous Si-N) thin film was studied using inductively coupled plasma-assisted reactive magnetron sputtering at room temperature. Transparent and hard Al-Si-N thin films with Si contents of 5-45 at% were deposited and characterized. Further, to protect PC from UV radiation below 300 nm in wavelength, UV-blocking a-SiN:H thin films were deposited at different H2 flow rates ranging from 2 to 8 sccm. The average transmittance of 460 nm thick Al-Si-N thin films was measured to be greater than 80% in the visible spectral range, and the maximum hardness of 31 GPa was obtained at 24 at% Si content. The UV transmittance of 140 nm thick a-SiN:H thin films was found to be less than 3% at wavelengths shorter than 300 nm. The double-layer structure of Al-Si-N (460 nm)/a-SiN:H (140 nm) showed a hardness of 29 GPa and an average transmittance of 78% for visible light along with a UV transmittance of less than 3%. In this study, the protective coating layer deposition for PC glazing applications was developed and characterized.

AB - To improve the scratch resistance and UV weatherability of polycarbonate (PC), a protective layer consisting of a transparent Al-Si-N thin film of high hardness and a UV-blocking a-SiN:H (hydrogenated amorphous Si-N) thin film was studied using inductively coupled plasma-assisted reactive magnetron sputtering at room temperature. Transparent and hard Al-Si-N thin films with Si contents of 5-45 at% were deposited and characterized. Further, to protect PC from UV radiation below 300 nm in wavelength, UV-blocking a-SiN:H thin films were deposited at different H2 flow rates ranging from 2 to 8 sccm. The average transmittance of 460 nm thick Al-Si-N thin films was measured to be greater than 80% in the visible spectral range, and the maximum hardness of 31 GPa was obtained at 24 at% Si content. The UV transmittance of 140 nm thick a-SiN:H thin films was found to be less than 3% at wavelengths shorter than 300 nm. The double-layer structure of Al-Si-N (460 nm)/a-SiN:H (140 nm) showed a hardness of 29 GPa and an average transmittance of 78% for visible light along with a UV transmittance of less than 3%. In this study, the protective coating layer deposition for PC glazing applications was developed and characterized.

KW - Al-Si-N

KW - hardness test

KW - optical properties

KW - polycarbonate glazaing

KW - sputtering

UR - http://www.scopus.com/inward/record.url?scp=84962909427&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84962909427&partnerID=8YFLogxK

U2 - 10.1007/s12540-016-5492-0

DO - 10.1007/s12540-016-5492-0

M3 - Article

SP - 1

EP - 9

JO - Metals and Materials International

JF - Metals and Materials International

SN - 1598-9623

ER -