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Alkoxyl monolayers as anti-stiction coatings in Si-based MEMS devices
Yongseok Jun
, Xiaoyang Zhu
Research output
:
Contribution to journal
›
Article
›
peer-review
17
Citations (Scopus)
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Engineering & Materials Science
Stiction
95%
Monolayers
88%
MEMS
62%
Coatings
50%
Interfacial energy
41%
Silicon
39%
Control surfaces
19%
Polysilicon
19%
Cantilever beams
18%
Etching
18%
Electrostatics
17%
Adhesion
15%
Atmospheric humidity
15%
Hydrogen
13%
Friction
11%
Liquids
11%
Physics & Astronomy
stiction
100%
microelectromechanical systems
65%
coatings
45%
silicon
36%
surface energy
32%
control surfaces
23%
cantilever beams
19%
actuation
17%
coefficient of friction
16%
humidity
16%
assembly
14%
adhesion
14%
electrostatics
12%
etching
12%
hydrogen
10%
liquids
8%
Chemical Compounds
Monolayer
50%
Coating Agent
40%
Interfacial Energy
33%
Cantilever Beam
27%
Surface
21%
Friction Coefficient
18%
Etching
15%
Humidity
15%
Polycrystalline Solid
14%
Length
10%
Environment
9%
Hydrogen
8%
Medicine & Life Sciences
Silicon
81%
Equipment and Supplies
40%
Controlled Environment
23%
Friction
20%
Static Electricity
19%
Humidity
19%
Hydrogen
19%