All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim, Suk Ho Cho, Young Woo Ok, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

An all solid-state thin-film microsupercapacitor (TFSC) fabricated with tungsten cosputtered ruthenium oxide electrodes and LiPON electrolyte was presented. The room-temperature charge-discharge behavior of the TFSC was shown to be similar to that of a bulk-type supercapacitor. It was found that the W-RuO2-based TFSC presented a higher discharge specific capacitance and more stable cyclibility, compared with those of the RuO2-based TFSC.

Original languageEnglish
Pages (from-to)949-952
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number3
Publication statusPublished - 2003 May 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

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