All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim, Suk Ho Cho, Young Woo Ok, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)
Original languageEnglish
Pages (from-to)949-952
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number3
DOIs
Publication statusPublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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