An all solid-state thin-film microsupercapacitor (TFSC) fabricated with tungsten cosputtered ruthenium oxide electrodes and LiPON electrolyte was presented. The room-temperature charge-discharge behavior of the TFSC was shown to be similar to that of a bulk-type supercapacitor. It was found that the W-RuO2-based TFSC presented a higher discharge specific capacitance and more stable cyclibility, compared with those of the RuO2-based TFSC.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2003 May 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Surfaces and Interfaces
- Physics and Astronomy (miscellaneous)