All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes

Han Ki Kim, Suk Ho Cho, Young Woo Ok, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

An all solid-state thin-film microsupercapacitor (TFSC) fabricated with tungsten cosputtered ruthenium oxide electrodes and LiPON electrolyte was presented. The room-temperature charge-discharge behavior of the TFSC was shown to be similar to that of a bulk-type supercapacitor. It was found that the W-RuO2-based TFSC presented a higher discharge specific capacitance and more stable cyclibility, compared with those of the RuO2-based TFSC.

Original languageEnglish
Pages (from-to)949-952
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number3
Publication statusPublished - 2003 May 1
Externally publishedYes

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Ruthenium
ruthenium
Tungsten
tungsten
solid state
Thin films
Electrodes
Oxides
electrodes
oxides
thin films
electrochemical capacitors
Capacitance
capacitance
Electrolytes
electrolytes
room temperature
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

All solid-state rechargeable thin-film microsupercapacitor fabricated with tungsten cosputtered ruthenium oxide electrodes. / Kim, Han Ki; Cho, Suk Ho; Ok, Young Woo; Seong, Tae Yeon; Yoon, Young Soo.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 3, 01.05.2003, p. 949-952.

Research output: Contribution to journalArticle

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