Al2O3 coating of ZnO nanorods by atomic layer deposition

B. Min; J. S. Lee; J. W. Hwang; K. H. Keem; M. I. Kang; K. Cho; M. Y. Sung; S. Kim; M. S. Lee; S. O. Park; J. T. Moon

doi:10.1016/S0022-0248(03)00967-9

Al₂O₃ coating of ZnO nanorods by atomic layer deposition

B. Min, J. S. Lee, J. W. Hwang, K. H. Keem, M. I. Kang, K. Cho, M. Y. Sung, S. Kim, M. S. Lee, S. O. Park, J. T. Moon

Research output: Contribution to journal › Article › peer-review

57 Citations (Scopus)

Abstract

ZnO nanorods were coated conformally with aluminum oxide (Al₂O₃) material by atomic layer deposition (ALD). The ZnO nanorods were first synthesized on a Si(1 0 0) substrate from ball-milled ZnO powders by a thermal evaporation procedure. Al₂O₃ films were then deposited on these ZnO nanorods by ALD at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) images of the deposited ZnO nanorods revealed that amorphous Al₂O₃ cylindrical shells surround the ZnO nanorods. These TEM images illustrate that ALD has an excellent capability to coat any shape of nanorods conformally.

Original language	English
Pages (from-to)	565-569
Number of pages	5
Journal	Journal of Crystal Growth
Volume	252
Issue number	4
DOIs	https://doi.org/10.1016/S0022-0248(03)00967-9
Publication status	Published - 2003 May

Keywords

A1. Coating
A1. Transmission electron microscopy
A2. Atomic layer deposition
B1. AlO
B1. ZnO nanorods

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

Access to Document

10.1016/S0022-0248(03)00967-9

Cite this

@article{e2a786e3b4b14b359c2c61c736577913,

title = "Al2O3 coating of ZnO nanorods by atomic layer deposition",

abstract = "ZnO nanorods were coated conformally with aluminum oxide (Al2O3) material by atomic layer deposition (ALD). The ZnO nanorods were first synthesized on a Si(1 0 0) substrate from ball-milled ZnO powders by a thermal evaporation procedure. Al2O3 films were then deposited on these ZnO nanorods by ALD at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) images of the deposited ZnO nanorods revealed that amorphous Al2O3 cylindrical shells surround the ZnO nanorods. These TEM images illustrate that ALD has an excellent capability to coat any shape of nanorods conformally.",

keywords = "A1. Coating, A1. Transmission electron microscopy, A2. Atomic layer deposition, B1. AlO, B1. ZnO nanorods",

author = "B. Min and Lee, {J. S.} and Hwang, {J. W.} and Keem, {K. H.} and Kang, {M. I.} and K. Cho and Sung, {M. Y.} and S. Kim and Lee, {M. S.} and Park, {S. O.} and Moon, {J. T.}",

note = "Funding Information: This work was supported by the Korean Ministry of Science and Technology as a part of the {\textquoteleft}02 Nuclear R&D Program, Grant No. 1999-2-302-017-5 and Grant No. R01-2002-000-0(2002) from the Basic Research Program of the Korea Science and Engineering Foundation, and National R&D project for nano science and technology. The authors thank Mr. N.G. Yoon at A Tech Ltd. for his help. ",

year = "2003",

month = may,

doi = "10.1016/S0022-0248(03)00967-9",

language = "English",

volume = "252",

pages = "565--569",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "4",

}

TY - JOUR

T1 - Al2O3 coating of ZnO nanorods by atomic layer deposition

AU - Min, B.

AU - Lee, J. S.

AU - Hwang, J. W.

AU - Keem, K. H.

AU - Kang, M. I.

AU - Cho, K.

AU - Sung, M. Y.

AU - Kim, S.

AU - Lee, M. S.

AU - Park, S. O.

AU - Moon, J. T.

N1 - Funding Information: This work was supported by the Korean Ministry of Science and Technology as a part of the ‘02 Nuclear R&D Program, Grant No. 1999-2-302-017-5 and Grant No. R01-2002-000-0(2002) from the Basic Research Program of the Korea Science and Engineering Foundation, and National R&D project for nano science and technology. The authors thank Mr. N.G. Yoon at A Tech Ltd. for his help.

PY - 2003/5

Y1 - 2003/5

N2 - ZnO nanorods were coated conformally with aluminum oxide (Al2O3) material by atomic layer deposition (ALD). The ZnO nanorods were first synthesized on a Si(1 0 0) substrate from ball-milled ZnO powders by a thermal evaporation procedure. Al2O3 films were then deposited on these ZnO nanorods by ALD at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) images of the deposited ZnO nanorods revealed that amorphous Al2O3 cylindrical shells surround the ZnO nanorods. These TEM images illustrate that ALD has an excellent capability to coat any shape of nanorods conformally.

AB - ZnO nanorods were coated conformally with aluminum oxide (Al2O3) material by atomic layer deposition (ALD). The ZnO nanorods were first synthesized on a Si(1 0 0) substrate from ball-milled ZnO powders by a thermal evaporation procedure. Al2O3 films were then deposited on these ZnO nanorods by ALD at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM) images of the deposited ZnO nanorods revealed that amorphous Al2O3 cylindrical shells surround the ZnO nanorods. These TEM images illustrate that ALD has an excellent capability to coat any shape of nanorods conformally.

KW - A1. Coating

KW - A1. Transmission electron microscopy

KW - A2. Atomic layer deposition

KW - B1. AlO

KW - B1. ZnO nanorods

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