Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

J. S. Lee, B. Min, K. Cho, Sangsig Kim, J. Park, Y. T. Lee, N. S. Kim, M. S. Lee, S. O. Park, J. T. Moon

Research output: Contribution to journalArticle

92 Citations (Scopus)

Abstract

Aluminum oxide (Al2O3) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). Al2O3 material was deposited on the MWNTs at a substrate temperature of 300°C using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous Al2O3 material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.

Original languageEnglish
Pages (from-to)443-448
Number of pages6
JournalJournal of Crystal Growth
Volume254
Issue number3-4
DOIs
Publication statusPublished - 2003 Jul 1

Fingerprint

Carbon Nanotubes
Atomic layer deposition
Multiwalled carbon nanotubes (MWCN)
atomic layer epitaxy
Nanorods
Nanotubes
nanorods
Carbon nanotubes
nanotubes
carbon nanotubes
coatings
Coatings
transmission electron microscopy
Aluminum Oxide
amorphous materials
High resolution transmission electron microscopy
Crystallites
Electron diffraction
crystallites
electron diffraction

Keywords

  • A1. Coating
  • A1. Filling
  • A3. Atomic layer deposition
  • B1. AlO nanotube
  • B1. CNT

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition. / Lee, J. S.; Min, B.; Cho, K.; Kim, Sangsig; Park, J.; Lee, Y. T.; Kim, N. S.; Lee, M. S.; Park, S. O.; Moon, J. T.

In: Journal of Crystal Growth, Vol. 254, No. 3-4, 01.07.2003, p. 443-448.

Research output: Contribution to journalArticle

Lee, J. S. ; Min, B. ; Cho, K. ; Kim, Sangsig ; Park, J. ; Lee, Y. T. ; Kim, N. S. ; Lee, M. S. ; Park, S. O. ; Moon, J. T. / Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition. In: Journal of Crystal Growth. 2003 ; Vol. 254, No. 3-4. pp. 443-448.
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AU - Cho, K.

AU - Kim, Sangsig

AU - Park, J.

AU - Lee, Y. T.

AU - Kim, N. S.

AU - Lee, M. S.

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