Abstract
We report an Al2O3/AlN/Al-based backside diffuse reflector for near-ultraviolet light-emitting diodes (NUV LEDs), and its superiority compared with conventional reflectors. After fabrication of LEDs, a sapphire (Al2O3) surface was UV-irradiated to utilize the diffuse reflection effect by roughening the surface. Then, a thermally treated AlN layer was deposited on it, to obtain a mirror-like surface, before deposition of Al. The reflectance increased by 1.3% and 3.9% for these Al2O3/AlN/Al reflectors without and with surface treatment, respectively, compared with an Al reflector. These reflectors were then used with 370 nm AlGaN NUV LEDs, and the performances of LEDs without and with an Al reflector were compared. As a result, the NUV LED with both thermally and UV-treated AlN/Al reflector exhibited the best performance, and its output power and electroluminescence intensity were higher by 82.7% and 41.9%, respectively, than those of the LED without a reflector.
| Language | English |
|---|---|
| Pages | 1009-1015 |
| Number of pages | 7 |
| Journal | Journal of Alloys and Compounds |
| Volume | 776 |
| DOIs | |
| Publication status | Published - 2019 Mar 5 |
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Keywords
- Backside reflector
- Light-emitting diodes
- Surface treatment
- Ultraviolet
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry
Cite this
Al2O3/AlN/Al-based backside diffuse reflector for high-brightness 370-nm AlGaN ultraviolet light-emitting diodes. / Park, Tae Hoon; Lee, Tae Ho; Kim, Tae Geun.
In: Journal of Alloys and Compounds, Vol. 776, 05.03.2019, p. 1009-1015.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Al2O3/AlN/Al-based backside diffuse reflector for high-brightness 370-nm AlGaN ultraviolet light-emitting diodes
AU - Park, Tae Hoon
AU - Lee, Tae Ho
AU - Kim, Tae Geun
PY - 2019/3/5
Y1 - 2019/3/5
N2 - We report an Al2O3/AlN/Al-based backside diffuse reflector for near-ultraviolet light-emitting diodes (NUV LEDs), and its superiority compared with conventional reflectors. After fabrication of LEDs, a sapphire (Al2O3) surface was UV-irradiated to utilize the diffuse reflection effect by roughening the surface. Then, a thermally treated AlN layer was deposited on it, to obtain a mirror-like surface, before deposition of Al. The reflectance increased by 1.3% and 3.9% for these Al2O3/AlN/Al reflectors without and with surface treatment, respectively, compared with an Al reflector. These reflectors were then used with 370 nm AlGaN NUV LEDs, and the performances of LEDs without and with an Al reflector were compared. As a result, the NUV LED with both thermally and UV-treated AlN/Al reflector exhibited the best performance, and its output power and electroluminescence intensity were higher by 82.7% and 41.9%, respectively, than those of the LED without a reflector.
AB - We report an Al2O3/AlN/Al-based backside diffuse reflector for near-ultraviolet light-emitting diodes (NUV LEDs), and its superiority compared with conventional reflectors. After fabrication of LEDs, a sapphire (Al2O3) surface was UV-irradiated to utilize the diffuse reflection effect by roughening the surface. Then, a thermally treated AlN layer was deposited on it, to obtain a mirror-like surface, before deposition of Al. The reflectance increased by 1.3% and 3.9% for these Al2O3/AlN/Al reflectors without and with surface treatment, respectively, compared with an Al reflector. These reflectors were then used with 370 nm AlGaN NUV LEDs, and the performances of LEDs without and with an Al reflector were compared. As a result, the NUV LED with both thermally and UV-treated AlN/Al reflector exhibited the best performance, and its output power and electroluminescence intensity were higher by 82.7% and 41.9%, respectively, than those of the LED without a reflector.
KW - Backside reflector
KW - Light-emitting diodes
KW - Surface treatment
KW - Ultraviolet
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U2 - 10.1016/j.jallcom.2018.10.264
DO - 10.1016/j.jallcom.2018.10.264
M3 - Article
VL - 776
SP - 1009
EP - 1015
JO - Journal of Alloys and Compounds
T2 - Journal of Alloys and Compounds
JF - Journal of Alloys and Compounds
SN - 0925-8388
ER -