An 8F2 MRAM Technology using Modified Metal Lines

J. H. Park, W. C. Jeong, H. J. Kim, J. H. Oh, H. C. Koo, G. H. Koh, G. T. Jeong, H. S. Jeong, Y. J. Jeong, S. L. Cho, J. E. Lee, Kinam Kim

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

A novel 8F2 cell structure for high density Magnetic Random Access Memory (MRAM) and its operation characteristics are proposed. In this new scheme, we formed bottom electrode contact (BEC) through twin metal lines (M1s) and magnetic tunnel junction (MTJ) was located just on BEC for the reduction of cell size. From the results of simulation and experiment, we have confirmed that the generated magnetic field in new scheme is more uniform than that in conventional scheme with the negligible reduction of writing field strength. We adopted self-aligned BEC process to prevent the electrical shorting between M1 and BEC. To avoid the electrical shorting and improve the magnetic properties of MTJs, chemical mechanical polishing (CMP) process was adopted before MTJ deposition. As a result, we confirmed the feasibility of high-density 1T1MTJ MRAM, composed of 8F2 cells with the optimal MTJ characteristics.

Original languageEnglish
Pages (from-to)827-830
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 2003
EventIEEE International Electron Devices Meeting - Washington, DC, United States
Duration: 2003 Dec 82003 Dec 10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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    Park, J. H., Jeong, W. C., Kim, H. J., Oh, J. H., Koo, H. C., Koh, G. H., Jeong, G. T., Jeong, H. S., Jeong, Y. J., Cho, S. L., Lee, J. E., & Kim, K. (2003). An 8F2 MRAM Technology using Modified Metal Lines. Technical Digest - International Electron Devices Meeting, 827-830.