An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devices

B. L. Chua, V. J. Logeeswaran, M. L. Chan, H. K. Park, D. A. Horsley, N. C. Tien

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

For the study of miniature ion propulsion engine and electric wind devices, we have developed an electrohydrodynamically (EHD) driven microfabricated actuator. It consumes a maximum power of 100mW and has a maximum resultant driving force of 0.45 μN in the first observed driving mode. The actuator consists of a mass/spring configuration fabricated with dual ion drives for propulsion. D.C. partial electrical discharge produces and accelerates the ions. Electric wind is generated by the momentum transfer from the ions to the air. Momentum is also transferred by virtue of the formation of intermittent space charge near the ionization zone. A selection between single and dual ion drives allows observation of various oscillation modes beginning at 896 Hz. The maximum out-of-plane oscillation amplitude measured was approximately 2μm.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages197-200
Number of pages4
DOIs
Publication statusPublished - 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Actuator
  • Electric wind
  • Electrohydrodynamic
  • Ion propulsion

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Chua, B. L., Logeeswaran, V. J., Chan, M. L., Park, H. K., Horsley, D. A., & Tien, N. C. (2005). An electrohydrodynamically driven microfabricated actuator for the study of miniature ion propulsion engine and electric wind devices. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 197-200). [1C5.3] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496392