An electrostatic micromechanical biosensor for electrical detection of label-free DNA

Ji Min Choi, Sung Up Hwang, Chang Hoon Kim, Hyun Ho Yang, Cheulhee Jung, Hyun Gyu Park, Jun Bo Yoon, Yang Kyu Choi

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

An electrostatic micromechanical biosensor is demonstrated for the label-free electrical detection of DNA, based on electrostatic actuation of a double-clamped micromechanical cantilever by driving gate electrodes to establish a current path through drain and source electrodes. Intrinsic charges in DNA alter surface charges on the gate by pre-charging concept and change the pull-in voltage (V PI), the voltage required to bring the suspended cantilever into contact with the drain electrode by induced electrostatic force. Its operation principle is verified by a numerical simulation and a capacitive model. The proposed biosensor represents a breakthrough for practical exploitation of electro-mechanical based sensors.

Original languageEnglish
Article number163701
JournalApplied Physics Letters
Volume100
Issue number16
DOIs
Publication statusPublished - 2012 Apr 16
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Choi, J. M., Hwang, S. U., Kim, C. H., Yang, H. H., Jung, C., Gyu Park, H., Yoon, J. B., & Choi, Y. K. (2012). An electrostatic micromechanical biosensor for electrical detection of label-free DNA. Applied Physics Letters, 100(16), [163701]. https://doi.org/10.1063/1.3703764