We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.
- Integrated Mach-Zehnder interferometric biochip
- Plasma-enhanced chemical vapor deposition
- Silicon oxynitride layers
ASJC Scopus subject areas
- Materials Science(all)
- Physics and Astronomy(all)