An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

Sung Joong Choo, Jinsik Kim, Kyung Woon Lee, Dong Ho Lee, Hyun Joon Shin, Jung Ho Park

Research output: Contribution to journalArticle

6 Citations (Scopus)


We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

Original languageEnglish
Pages (from-to)954-959
Number of pages6
JournalCurrent Applied Physics
Issue number7
Publication statusPublished - 2014 Jul



  • DNA
  • Integrated Mach-Zehnder interferometric biochip
  • Plasma-enhanced chemical vapor deposition
  • Silicon oxynitride layers

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

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