Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors

Dong Hyun Kim, Ohmyoung Kwon, Kyung Su Oh, Young Ki Choi, Seungho Park, Joon Sik Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports the design and simulation of thermal double-cantilever bimorph(TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μ m width and 100μm length, TDCB actuators result in vertical displacement of 28 μ m at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.

Original languageEnglish
Title of host publication2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
Pages1063-1067
Number of pages5
DOIs
Publication statusPublished - 2008
Event1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08 - Tainan, Taiwan, Province of China
Duration: 2008 Jan 62008 Jan 9

Publication series

Name2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008
VolumePART B

Conference

Conference1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08
CountryTaiwan, Province of China
CityTainan
Period08/1/608/1/9

Keywords

  • Intellisuite
  • Micro actuators
  • Thermal double-cantilever bimorph actuators
  • Thermal expansion

ASJC Scopus subject areas

  • Mechanics of Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Kim, D. H., Kwon, O., Oh, K. S., Choi, Y. K., Park, S., & Lee, J. S. (2008). Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors. In 2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008 (pp. 1063-1067). (2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008; Vol. PART B). https://doi.org/10.1115/MNHT2008-52085