@inproceedings{27c3bb88e2f845d8a0064fcc080de61c,
title = "Analysis and design of thermal double-cantilever bimorph actuators for rotating-type micromirrors",
abstract = "This paper reports the design and simulation of thermal double-cantilever bimorph(TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μ m width and 100μm length, TDCB actuators result in vertical displacement of 28 μ m at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.",
keywords = "Intellisuite, Micro actuators, Thermal double-cantilever bimorph actuators, Thermal expansion",
author = "Kim, {Dong Hyun} and Ohmyoung Kwon and Oh, {Kyung Su} and Choi, {Young Ki} and Seungho Park and Lee, {Joon Sik}",
year = "2008",
doi = "10.1115/MNHT2008-52085",
language = "English",
isbn = "0791842924",
series = "2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008",
pages = "1063--1067",
booktitle = "2008 Proceedings of the ASME Micro/Nanoscale Heat Transfer International Conference, MNHT 2008",
note = "1st ASME Micro/Nanoscale Heat Transfer International Conference, MNHT08 ; Conference date: 06-01-2008 Through 09-01-2008",
}