In this paper, piezoelectric linear ultrasonic motors (PLUM) have been investigated on the elliptic trajectory of a contact point in shaking beam, which has been accomplished by two resonance vibration modes of the actuators. The actuators have generated the vibration modes, longitudinal and flexural, by two longitudinal mechanical vibrations with phase difference of π/2. Modal and harmonic analysis of the shaking beam actuator were performed by the finite element method (FEM) to calculate a resonance frequency and a modal shape and to perform harmonic response. Experimental results proved that a contact point of the PLUM tends to move with an elliptic trajectory.
|Number of pages||6|
|Journal||IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control|
|Publication status||Published - 2004 Nov 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Acoustics and Ultrasonics