Analysis of Si wafer coated by spin-on-glass for laser ablation ICP-MS

W. K. Ryu, J. S. Kim, J. S. Lee, H. B. Lim, P. K. Jun

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Analysis of Si wafer coated by spin-on-glass for laser ablation ICP-MS'. Together they form a unique fingerprint.

Chemical Compounds