Analytical calculation and fabrication of FET-embedded capacitive micromachined ultrasonic transducer

Jin Soo Park, Jung Yeon Kim, Ji Hoon Lee, Hee Kyoung Bae, Jinsik Kim, Kyo Seon Hwang, Jung Ho Park, Rino Choi, Byung Chul Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Physics & Astronomy