Anodic bonding technique for silicon-to-ITO coated glass bonding

Woo Beom Choi, Byeong Kwon Ju, Yun Hi Lee, Myung Hwan Oh, Man Young Sung

Research output: Contribution to journalConference article

Abstract

We performed silicon-to-In203:Sn coated glass bonding using anodic bonding process. Corning #7740 glass layer was deposited on In203:Sn coated glass by electron beam evaporation. It was confirmed that the composition of the deposited glass layer was nearly same as that of the bulk Corning #7740 glass plate using Auger electron spectroscopy (AES). In this work, silicon and In203:Sn coated glass with the deposited glass layer can be bonded at 190°C with an applied voltage of 6OVDC. In order to study the role of sodium ion, firstly, the bonding kinetics are modeled as resulting from the transport of sodium ions through the surface of the deposited glass layer. Secondary, the results of secondary ion mass spectroscopy (SIMS) analysis were used to confirm the modeled bonding kinetics of silicon-to-In203:Sn coated glass. This process can be applied for the vacuum packaging of microelectronic devices such as field emission display (FED).

Original languageEnglish
Pages (from-to)336-341
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3046
DOIs
Publication statusPublished - 1997 Jun 19
EventSmart Structures and Materials 1997: Smart Electronics and MEMS - San Diego, United States
Duration: 1997 Mar 31997 Mar 6

Fingerprint

Glass bonding
Silicon
ITO (semiconductors)
Glass
glass
silicon
Ions
Sodium
Spectroscopy
Field emission displays
Kinetics
sodium
Field Emission
ions
Auger electron spectroscopy
kinetics
Microelectronics
Packaging
Electron Beam
Evaporation

Keywords

  • Anodic bonding
  • Silicon-to-ito coated glass bonding
  • Sims analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Anodic bonding technique for silicon-to-ITO coated glass bonding. / Choi, Woo Beom; Ju, Byeong Kwon; Lee, Yun Hi; Oh, Myung Hwan; Sung, Man Young.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3046, 19.06.1997, p. 336-341.

Research output: Contribution to journalConference article

Choi, Woo Beom ; Ju, Byeong Kwon ; Lee, Yun Hi ; Oh, Myung Hwan ; Sung, Man Young. / Anodic bonding technique for silicon-to-ITO coated glass bonding. In: Proceedings of SPIE - The International Society for Optical Engineering. 1997 ; Vol. 3046. pp. 336-341.
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