Application of 3-dimensional phase-diagram using FactSage in C 3H 8-SiCl 4-H 2 system

Jun Woo Kim, Hyung Tae Kim, Kyung Ja Kim, Jong Heun Lee, Kyoon Choi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In order to deposit a homogeneous and uniform β-SiC films by chemical vapor deposition, we constructed the phase-diagram of β-SiC over graphite and silicon via computational thermodynamic calculation considering pressure(P), temperature(T) and gas composition(C) as variables in C 3H 8-SiCl 4-H 2 system. During the calculation, the ratio of Cl/Si and C/Si is maintained to be 4 and 1, respectively, and H/Si ratio is varied from 2.67 to 15,000. The P-T-C diagram showed very steep phase boundary between SiC+C and SiC region perpendicular to H/Si axis and also showed SiC+Si region with very large H/Si value of ∼6700. The diagram can be applied not only to the prediction of the deposited phase composition but to compositional variation due to the temperature distribution in the reactor. The P-T-C diagram could provide the better understanding of chemical vapor deposition of silicon carbide.

Original languageEnglish
Pages (from-to)621-624
Number of pages4
JournalJournal of the Korean Ceramic Society
Volume48
Issue number6
DOIs
Publication statusPublished - 2011 Nov 1

Fingerprint

Phase diagrams
Chemical vapor deposition
Graphite
Phase boundaries
Silicon
Phase composition
Silicon carbide
Temperature distribution
Deposits
Gases
Thermodynamics
Chemical analysis
Temperature
silicon carbide

Keywords

  • Computer simulation
  • CVD
  • Silicon carbide
  • Thermodynamic calculation

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Application of 3-dimensional phase-diagram using FactSage in C 3H 8-SiCl 4-H 2 system. / Kim, Jun Woo; Kim, Hyung Tae; Kim, Kyung Ja; Lee, Jong Heun; Choi, Kyoon.

In: Journal of the Korean Ceramic Society, Vol. 48, No. 6, 01.11.2011, p. 621-624.

Research output: Contribution to journalArticle

Kim, Jun Woo ; Kim, Hyung Tae ; Kim, Kyung Ja ; Lee, Jong Heun ; Choi, Kyoon. / Application of 3-dimensional phase-diagram using FactSage in C 3H 8-SiCl 4-H 2 system. In: Journal of the Korean Ceramic Society. 2011 ; Vol. 48, No. 6. pp. 621-624.
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